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Report of the Dutch Ellipsometry Workshop 2010

On February 11, 2010 the Dutch Ellipsometry Workshop, organised by Herbert Wormeester, took place at the Drienerburght on the University of Twente.

Invited speakers:

·

Thomas Wagner / LOT-ORIEL

·

Peter H. Thiesen / ACURION.

·

Bruno Gompf / University of Stuttgart

The workshop was sponsored by 

The ellipsometry workshop was well visited with an attendance of 43 persons. Many of these came from various groups within the University of Twente, but also a large delegation from the Technical University Eindhoven attended the meeting.

The large number of attendants indicates the large interest for this optical characterisation technique. The aim of the workshop was also to provide an easy access for novice and potential users.

The contribution of all speakers, and especially that of Thomas Wagner from LOT-Oriel, certainly provided a tutorial aspect. The mix of tutorial aspects and the presentation of state of the art ellipsometric results provided a fruitful basis for extended discussions.

Below you’ll find some presentations:

In situ spectroscopic ellipsometry as a versatile tool to study atomic layer deposition

by Erik Langereis – University of Eindhoven

Optical properties of Metamaterials

by Bruno Gompf – University of Stuttgart

In-situ Monitoring of Thin-Film Formation Processes bySpectroscopic Ellipsometry

by Alexey Kovalgin – University of Twente

Introduction into Spectroscopic Ellipsometry -Basics, Data Interpretation Considerations and Applicationsto Photovoltaics

by Thomas Wagner, L.O.T.-Oriel GmbH & Co. KG