This specialisation belongs to the Master's Electrical Engineering.
Miniaturization allows the creation of highly sensitive, compact, light-weight sensors and sensor systems. Besides their small size, a fascinating aspect of such sensors is that multiple subfields of physics, chemistry and electrical engineering come together when we want to make and understand such sensor systems.
The research on micro sensors and systems spans from materials via process integration and device physics to device reliability; you can usually find us in or around Nanolab. Examples are: ultra-low-noise accelerometers for noise reduction in the detection of gravitation waves and microfluidic measurement systems for medical drug delivery.
The Micro Sensors and Systems track is directly linked with the research group Integrated Devices and Systems (IDS) and the research institute MESA+. This means you will have excellent peer guidance and will be working on the newest challenges.