FROM RADICAL-ENHANCED TO PURE THERMAL ALD OF GALLIUM AND ALUMINIUM NITRIDES
Sourish Banerjee is a PhD student in the department of Integrated Devices and Systems (IDS). His supervisor prof.dr. D.J. Gravensteijn and his co-supervisor is dr. A.Y. Kovalgin are both from the faculty Electrical Engineering, Mathematics and Computer Science (EEMCS).
Voor meer informatie zie onze Engelse website.