Quantification of Uncertainties in Nano Optical Metrology (QUNOM) is a yearly workshop in which young PIs, PostDocs and PhD students in physics and mathematics research areas discuss measurement aspects and mathematical approaches of optical data analysis. This year this workshop was organised at the University of Twente. The workshop was attended by colleagues from the Netherlands, Germany, Belgium, France and England.
The idea of the workshop originates from Physikalisch-Technische Bundesanstalt (PTB) Berlin. PTB is a German metrology institute with comprehensive research in X-ray and EUV metrology of nanostructures and plays a crucial role in various fields. For example, the enabling and development of EUV lithography. XUV and the newly developed XTS groups of UT have a strong collaboration with PTB for the characterisation of reflective multilayer coatings and the improvement of the accuracy of thin film characterisation.
The modern development of optical metrology requires a tight connection between X-ray and optical scientists with mathematicians, that though obvious, requires extended attention. Dr. Igor Makhotkin, assistant professor at XUV says: “We organised the QUNOM workshop to boost awareness of the necessity of interdisciplinary collaboration among young researchers and to stimulate building the dynamic community. We discussed measurement aspects and mathematics principles of optical data analysis with a strong focus on the analysis of uncertainties.”
Dr. Makhotkin: “In the programme, we have focused on the physics and mathematics of analysis of X-ray scattering and coherent imaging. We have also organised a hands-on practicum on the determination of uncertainty and public outreach event for EU project ATMOC, focused on characterising optical constants on ultra-thin layers in broad spectral diapason. The workshop was supported by industrial users of metrology, a manufacturer of high-tech EUV, soft and hard X-ray mirrors optiX fab., Almelo-based world-leading manufacturer of X-ray equipment Malvern Panalytical, and the MESA+ institute.
Dr. Sebastian Heidenreich and Dr. Victor Soltwisch, co-organisers from PTB, stated: “The QUNOM workshop was truly a significant and well-organised event. It offered a valuable opportunity for young scientists to collaborate. It bridges the gap between mathematics, physics, and engineering in nanometrology. Participants’ insights and best practices made valuable contributions to the European joint research project ATMOC”.
