HV - reliability

Piezo-electric film formation on a silicon channel

CMOS Receiver Enhancement using Arrays with MEMS (CREAM)

MEMPHIS

Acoustic passive radar (APRA)

Low-cost biocompatible micro Coriolis mass flow sensor

Gold free contacts to Gallium Nitride transistors

Micro valves for precise flow dosage

Power sensor - power glove

PRECISE - Chemical micro propulsion for an efficient and accurate control of satellites for space exploration

Conductivity control

Parallel plate structures for optical modulation

Galvanic MEMS switches

AHALD

Coriolis based sensor and actuator systems