It was the objective of the PowerSensor project to develop micromachined sensors and algorithms for optimal estimation of 3D kinematics, power transfer and work performed during the mechanical interaction between a body, a human or a robot, and the environment. The PowerSensor project was a joint project with the Biomedical Signals and Systems (BSS) group.
The main task of MSS within this project was the realization of a 6 degree-of-freedom force-torque sensor that could be placed on a finger tip.
Figure 1: Force-torque sensor demonstrator device.
Figure 2: Structure and operating principle of the sensor.
REFERENCES
[1] R.A. Brookhuis, T.S.J. Lammerink, R.J. Wiegerink (2015) Differential capacitive sensing circuit for a multi-electrode capacitive force sensor. Sensors and actuators. A: Physical, 234.pp. 168-179.
[2] R.A. Brookhuis, R.G.P. Sanders, K. Ma, T.S.J. Lammerink, M.J. de Boer, G.J.M. Krijnen, R.J. Wiegerink (2015) Miniature large range multi-axis force-torque sensor for biomechanical applications. Journal of micromechanics and microengineering, 25 (2). 025012.
[3] R.A. Brookhuis (2014) Miniature force-torque sensors for biomechanical applications. PhD thesis, University of Twente. ISBN 978-90-365-3742-1
[4] R.A. Brookhuis, H. Droogendijk, M.J. de Boer, R.G.P. Sanders, T.S.J. Lammerink, R.J. Wiegerink, G.J.M. Krijnen (2014) Six-axis force-torque sensor with a large range for biomechanical applications. Journal of micromechanics and microengineering, 24 (3). pp. 1-10.
[5] D. Alveringh, R.A. Brookhuis, R.J. Wiegerink, G.J.M. Krijnen (2014) A Large Range Multi-Axis Capacitive Force/Torque Sensor Realized in a Single SOI Wafer. In: 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, 26-30 Jan 2014, San Francisco, USA, pp. 680-683.
[6] R.A. Brookhuis, T.S.J. Lammerink, R.J. Wiegerink (2013) Six-axis force-torque sensor. Patent US201314371632 (Application).
[7] R.A. Brookhuis, T.S.J. Lammerink, R.J. Wiegerink, K. Ma, G.J.M. Krijnen (2013) Large range multi-axis fingertip force sensor. In: 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 16-20 June 2013, Barcelona, Spain. pp. 2737-2740.
[8] R.A. Brookhuis, R.J. Wiegerink, T.S.J. Lammerink, G.J.M. Krijnen (2013) Three-axial force sensor with capacitive read-out using a differential relaxation oscillator. In: IEEE Sensors 2013, 3-6 Nov 2013, Baltimore, USA. pp. 1-4.
[9] R.A. Brookhuis, T.S.J. Lammerink, R.J. Wiegerink, M.J. de Boer, M.C. Elwenspoek (2012) 3D force sensor for biomechanical applications. Sensors and actuators A (Physical), 182 (182). pp. 28-33.
[10] P.H. Veltink, H.G. Kortier, H.M. Schepers, V.IJ. Sluiter, R.A. Brookhuis, T.S.J. Lammerink, R.J. Wiegerink (2012) PowerGlove, Concepts and current results. In: Proceedings of XII International Symposium on 3D Analysis of Human Movement, DAHM 2012, 18-20 July 2012, Bologna, Italy. pp. 42-45.
[11] R.A. Brookhuis, R.J. Wiegerink, T.S.J. Lammerink, M.J. de Boer (2012) Scalable six-axis force-torque sensor with a large range for biomechanical applications. In: Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on, 29 Jan - 2 Feb 2012, Paris, France. pp. 595-598.
[12] R.A. Brookhuis, T.S.J. Lammerink, R.J. Wiegerink, M.J. de Boer, M.C. Elwenspoek (2011) Force sensor for measuring power transfer between the human body and the environment. In: 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011), 5-9 June 2011, Beijing, China. pp. 2042-2045.