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Piezo-electric film formation on a silicon channel

Buket Kaleli, Tom van Hemert

Some dielectric materials deform when an electric field is applied. This so-called converse piezo-electric effect could be used for novel electronic components with enhanced performance and miniaturization, by integration in thin film technology. Possible applications for these types of tunable devices are advanced digital or high frequency circuits. The goal of the project is to develop and manufacture novel tunable devices. The physical understanding will be developed by performing Finite-Element Method (FEM) simulations which eventually will be compared with experimental data obtained from test structures. In addition, the physical properties important for the device performance will be extracted. Finally based on these thin films, the devices with respect to their tuning properties are optimized.

This project is in strong collaboration with NXP Research Eindhoven, The Netherlands.