This STW-funded project aims to apply CMOS compatible materials and low temperature processing steps to monolithically integrate RF MEMS resonators on top of a CMOS chip. The targeted application of these high-Q RF MEMS resonators is for pre-filters for wireless front end applications. Since a single RF MEMS filter can not filter out a broad range of frequencies e.g. from 50 MHz to 5GHz, we eventually need arrays of tunable filters. The post processing technology developed for these arrays of resonators would lead us to low cost and miniaturized RF receivers, provided the yield loss is minimized.
This project is carried out in close collaboration with the groups IC-Design and Transducer Science and Technology at the University of Twente.