MESA+ University of Twente
Industrial focus group XUV Optics

Infrastructure

The XUV Optics Group avails of one of the finest thin film laboratories world-wide. Its 500 m2 laboratory contains state-of-the-art thin film and multilayer deposition and analysis facilities with dedicated clean room sections.

  • Deposition facilities
  • Thin film and surface analysis
  • EUV exposure set-up
  • MESA+ clean room facilities