MESA+ University of Twente
Industrial focus group XUV Optics

Infrastructure

The XUV Optics Group avails of one of the finest thin film laboratories world-wide. Its 500 m2 laboratory contains state-of-the-art thin film and multilayer deposition and analysis facilities with dedicated clean room sections.
·       Deposition facilities
·       Thin film and surface analysis
·       EUV exposure set-up
·       MESA+ clean room facilities