News | Integrated Devices and Systems | University of Twente

IDS and Bronkhorst bring flowmeters into the next generationJoost Lotters, professor in microfuidic handling systems at UT, is also science officer at Bronkhorst. Bronkhorst and the UT have joined forces with Krohne and TU Delft to bring flowmeters into the next genaration. Their goal: to develop new and innovative meters that could provide real-time insight and analytics of flowing media, all without having to interrupt the flow.
Mon 18 Jan 2021
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New project on MEMS testingAutomated testing for chips is a crucial step in the production process as a defect can (and will!) occur during the fabrication. Regular chips (i.e. integrated circuits) can be fully tested using electronic measurement equipment on large scale in just a few seconds. Microelectromechanical Systems (MEMS) chips are regularly used for sensing applications and consist of complex mechanical structures. In contrast with testing electronic chips, conventional testing of MEMS requires mechanical stimulation and measurements. Many MEMS chips are therefore currently tested by e.g. labor-intensive microscopy and specialized equipment containing moving instruments. In theory however, many MEMS chips can be fully tested by smart electrical stimulations in combination with sophisticated modeling. This would enable fully electrical testing and has a major advantage in test time and costs. In the METEORIET (MEms TEst voOR hoog volume Innovatieve Electronische Toepassingen) project, Salland Engineering, Bronkhorst, University of Twente, Saxion Hogeschool and MASER joined forces to develop versatile electronic MEMS test equipment.
Tue 24 Nov 2020
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