Monday 30 January 2023
A group of MCS researchers led by Erwin Berenschot and Niels Tas participated in the annual MEMS conference in Munich. Their submission, Contours of Gizeh, was selected as the winner of the Art in Microtechnology award at MEMS 2023. The image depicts pyramidal templates etched in silicon by a lateral self-aligned fractal fabrication scheme and replicated in silicon nitride nanowires by corner lithography.
