SEM

Main Characteristics:

• Accelaration voltage, 20V - 30kV
• Point resolution (SEM), 0.9nm@30kV in STEM mode, 1.2 nm in normal SEM mode
• Spatial resolution EDX, down to nm. range, applicable for elements above boron in the Periodic System

Facilities:
General SEM imaging

• High Efficiency Secondary Electron Detector (HE-SE2) for standard low energy electron topographical mapping
• Inlens detector for higher energy secondary electrons for clear topographic mapping
• Annular Selective Backscatter detector (ASB) for compositional and crystal orientation mapping
• Energy Selective Backscatter detector (ESB) for compositional contrast mapping
• Scanning TEM (STEM) possibility with best SEM resolution
• Electron Beam Induced Current (EBIC) for conductivity mappings
• Energy Dispersive X-ray with shutter(EDX) for elemental mappings
• Electron Backscatter Diffraction (EBSD)  for mappings of crystal orientations.
  
  
• Charge compensator with N2 gas / sample cleaning with O2 gas
• Built in plasma cleaner
• Heating stage, up to 800 °C
• EDX and EBSD are shielded for high temperatures
• Sample holders for many different types of SEM samples, 4” wafers, single stub, multiple stubs, 45° , 70°, 90° cross section holders, flat clamps, tilted clamps, double sided carbon tape, aluminum tape, copper tape, MFM tip holder, EBSD and transmissive EBSD holders.

PLEASE CONTACT:

M.A. Smithers (Mark) Operator HR-SEM

+31534895922

 m.a.smithers@utwente.nl

Building: Nanolab 1001

Personal page

You can find the SEM in NanoLab NL1.042

Applications

SEM explained

What is a scanning electron microscope, an introduction

cathodoluminescence (cl)

Not possible at the moment. CL in a SEM is a tool to characterise the optical and electronic properties of materials, then correlate them with morphology, microstructure, composition and chemistry at the nicrometre andd sub-nanometre scale; an introduction.

chemical analysis

EDX is one of the methods to find the surface composition; an introduction

High resolution imaging

Imaging of nanostructures by High-Resolution Scanning Electron Microscopy (HRSEM); an introduction.

Cross sections 360

Cross section view of the Zeiss Merlin with all its detectors

High Resolution Images