Analysis Equipment | Systems Integration Lab

Equipment such as microscopes but also oscilloscopes help understand that level of detail and information transmission in components. At SIL-EE, three main devices for electronical and optical analysis are provided: A laser microscope, an oscilloscope, a Vector Network Analyser and a MokuPro! In addition to that we also offer a Vector Network Analyser and SMU.

Laser Microscope (Keyence VK-X3000)

Like a regular microscope, a laser microscope serves to analyse any given item at micro-scale. With a laser microscope, the level of detail can be extremely high, allowing for nanometre-scale measurements of surface texture, roughness, and height. Instead of relying on reflected light alone, it scans the surface with a focused laser beam to build a precise 3D map of the sample, all without physical contact.

Keyence Microscope (Front view)

Keyence Microscope (Side view)

SIL-EE has a Keyence VK-X3000, a 3D laser microscope. Instead of relying on reflected light, it scans the surface with a focused laser to build a precise 3D map without ever touching the sample, measuring texture, roughness, and height down to the nanometers. It reaches magnifications up to 28,800× and resolves height differences down to 0.01 nm. It can scan areas up to 50 × 50 mm in one pass, automatically stitch larger samples with its motorised stage, and has built-in tools for distance, area, profile, and roughness.
At SIL-EE you can use it for e.g. inspecting solder joints and PCB traces, measuring component dimensions, checking surface wear or defects, and capturing high-resolution documentation images. It's meant for materials and electronics analysis, not biological imaging.

Down below is a link to the Keyence tutorial, it is very brief and only requires looking at SIL-EE's PC.

Specifics

_source:_{https://www.keyence.eu/products/microscope/laser-microscope/vk-x3000/models/vk-x3000/#:~:text=*Please%20note%20that%20accessories%20depicted,Measurement%20principle}

Model		VK-X3000
Type		Controller
Total magnification		42× to 28800×^*1
Field of view		11 to 7398 μm
Measurement principle		Laser confocal, Focus variation, White light interferometry, Spectral interference
Laser wavelength		VK-X3100: Semiconductor laser, 404 nm VK-X3050: Semiconductor laser, 661 nm
Max. laser measurement speed		Surface: 125 Hz, Line: 7900 Hz^*2
Max. laser output		1.0 mW
Laser class		Class 2 (IEC60825-1)
Laser light-receiving element		16-bit photomultiplier
White light source		White LED
White-light-receiving element		High-definition colour CMOS
Laser confocal	Height display resolution	VK-X3100: 0.1 nm VK-X3050: 1 nm
	Height repeatability σ	VK-X3100: 10×: 100 nm, 20×: 40 nm, 50×: 12 nm VK-X3050: 10×: 100 nm, 20×: 40 nm, 50×: 20 nm
	Height accuracy	0.2+L/100 μm or less^*3
	Width display resolution	VK-X3100: 0.1 nm VK-X3050: 1 nm
	Width repeatability 3σ	VK-X3100: 10×: 200 nm, 20×: 100 nm, 50×: 40 nm VK-X3050: 10×: 400 nm, 20×: 100 nm, 50×: 50 nm
	Width accuracy	Measured value ±2% or less^*3
Focus variation	Height display resolution	VK-X3100: 0.1 nm VK-X3050: 1 nm
	Height repeatability σ	VK-X3100: 5×: 500 nm, 10×: 100 nm, 20×: 50 nm, 50×: 20 nm VK-X3050: 5×: 500 nm, 10×: 100 nm, 20×: 50 nm, 50×: 30 nm
	Height accuracy	0.2+L/100 μm or less^*3
	Width display resolution	VK-X3100: 0.1 nm VK-X3050: 1 nm
	Width repeatability 3σ	VK-X3100: 5×: 400 nm, 10×: 400 nm, 20×: 120 nm, 50×: 50 nm VK-X3050: 5×: 400 nm, 10×: 400 nm, 20×: 120 nm, 50×: 65 nm
	Width accuracy	Measured value ±2% or less^*3
White light interferometry	Height display resolution	0.01 nm
	Width display resolution	0.1 nm
	Surface topography repeatability	0.08 nm^*4
	Repeatability of RMS	0.008 nm^*4
Spectral interference film thickness measurement	Repeatability σ	0.1 nm^*4
	Accuracy	±0.6%^*4
Optical observation	Number of pixels	5.6 million
	Revolver	6-hole electric revolver
	Ring illumination lens	2.5×, 5×, 10×
	Optical zoom	1 to 8×
XY stage configuration	Manual operation range	70 mm × 70 mm
	Motorised operation range	100 mm × 100 mm
Power supply	Power voltage	100 to 240 VAC, 50/60 Hz
	Power consumption	150 VA
Environmental resistance	Ambient temperature	+15 to 28°C
	Relative humidity	20 to 80% RH (No condensation)
Weight		Approx. 3 kg

^*1 When using a 23-inch full-screen display.
^*2 At top speed when using a combination of measurement mode/measurement quality/lens magnification. When the line scan measurement pitch is within 0.1 μm.
^*3 When measuring a standard sample with a 20× or greater lens.
^*4 Typical values under the default measurement environment.

MokuPro

WHAT IS A MOKUPRO?

The MokuPro is a multi-tool instrumentation device. It is essentially a physical box that can act as many different laboratory measurement instruments depending on what software is loaded onto it.

Moku:Pro (Front view)

Moku:Pro (Side view)

SIL-EE has a MokuPro, a high-end model with 4 input channels, 4 output channels, and 600 MHz analog bandwidth. It can be configured as an oscilloscope, spectrum analyser, waveform generator, frequency response analyser, lock-in amplifier, PID controller, and several other instruments, all from a single unit controlled through the Moku app on a connected computer or tablet. This makes it useful for projects that would otherwise need a full bench of separate test equipment, particularly in RF, photonics, and control systems work.

How To use it?

Typically, this requires an introductory session. Send an email to sil-ee@utwente.nl to schedule one.
There is a guide present to help navigate through any potential troubleshooting. Below is a link to the MokuPro tutorial in PDF format.

Oscilloscope (Rohde & Schwarz MXO 4 Series)

In order to measure electronics and their AC or DC signals, an oscilloscope is often needed. This is a device that can visualise electrical waveforms through a graphical display, plotting voltage over time so you can see exactly how a signal behaves. By connecting probes to different points in a circuit, you can measure voltage levels, frequency, signal shape, timing, and noise, all of which are difficult to detect with a simple multimeter. While related, current (amps A) and resistance (ohms Ω) are not measured directly by an oscilloscope itself; for those, a multimeter or current probe attachment is typically used alongside it.

Rohde & Schwarz MXO 4 Series (Front wiew)

Rohde & Schwarz MXO 4 Series (Side wiew)

SIL-EE has a Rohde & Schwarz MXO 4 Series, a 4-channel high-end oscilloscope with 1.5 GHz bandwidth, a 12-bit ADC for high-resolution waveform capture, and a fast update rate that allows rare or intermittent signal events to be caught reliably. It includes a large touchscreen interface, USB and Ethernet connectivity, and supports decoding of common digital protocols such as I²C, SPI, UART, and CAN. This makes it useful for everything from basic circuit debugging, to detailed signal integrity analysis in embedded systems, RF, and power electronics work.

Typically, using this requires an introductory session. Send an email to sil-ee@utwente.nl to schedule one.
There is a guide present to help navigate through any potential troubleshooting

Quick Specifics

_Source:_{https://eleshop.eu/rohde-schwarz-mxo44-242-200-mhz-4-ch-oscilloscope.html}

Channels	4
Memory depth	400 Mpts (per channel)
Sample rate	5 GS/s (on 2 channels, 2.5 GS/s on 4 channels)
Waveform capture rate	4500000 wfm/s
Vertical resolution	12 bits (18 bits in HD mode)
Vertical scale	0.5 mV/div - 1 V/div
Horizontal scale	200 ps/div - 10000 s/div
Interfaces	USB Host, USB Device, LAN, HDMI
Display	13.3" TFT LCD (1920x1080, Touch-screen)

Vector Network Analyser

To be written

SMU

To be written