ASSIGNMENT
Sources of HIO contamination
Contact: Dr. Igor Makhotkin (i.makhotkin@utwente.nl)
Challenge
- Hydrogen induced outgassing (HIO) – is a contamination mechanism when H species interact with contaminants forming volatile hydrides.
- These hydrides may be adsorbed on surfaces spreading contamination.
- HIO contamination sources such as various alloys, remaining detergents etc. are not well determined and investigated.
Application
- Contamination level control in green energy, semiconductors, thin films industries
Task
- Analyze the potential sources of HIO contamination
- Conduct basic H* exposure experiments with use of getter material Ru
Experimental-focused, applied