ASSIGNMENT MSC student
Developing a time-dependent temperature model for thin free-standing layers during extreme ultraviolet exposure
Contact: Duncan Ramsamoedj, d.c.ramsamoedj@utwente.nl, and Dr. Wesley van den Beld, w.t.e.vandenbeld@utwente.nl
When a thin (<100 nm) free-standing layer (window) is exposed to extreme ultraviolet (EUV) light with a synchrotron, it heats up to almost 1000 K inside the exposure spot. Far from the exposure spot, the window is room temperature. However, there is a transition region depending on the local heat conduction and radiative cooling. In addition, the local temperature vs time is also of interest when starting or stopping the exposure.
Knowing all of this is important, because the adsorption and desorption of species and the rate of chemical reactions are both influenced by the temperature.
During this assignment, you will investigate these processes and create an analytical and numerical model to estimate the local temperature. By doing this, you will learn about physical and chemical processes, modelling and coding.
Figure 1: temperature of a free-standing layer vs the radiative cooling (emissivity).
Image source: J. Appl. Phys.. 2015;118(21). doi:10.1063/1.4936851