Title: Fundamentals of Oxygen and Nitrogen Diffusion in Ru (FONDRu)
Project type: PPS2202
Project leader: Prof.dr. Marcelo Ackermann
Researchers: Dr.ir. Wesley van den Beld, Léon Gerlach, Dr. Tatiana Soto Montero and Sherif Kamal (former researchers: Dr.ir. Marko Sturm, Dr. Airat Shafikov, Dr. Parikshit Phadke)
Daily supervisor: Prof.dr. Marcelo Ackermann
Duration: 2022 – 2027
Funding: RVO PPS220DDM07U - TKI/HTSM
Industrial partner: ASML
In this project we focus on the interaction processes of ultrathin film coatings with reactive gaseous species, typically originating from plasma (Electron cyclotron resonance or Electron Beam). We investigate chemical and morphological modifications to gain insights of the underlying physics behind theses processes. A better understanding is needed to guide materials design and operating conditions to enhance the lifetime of optical coatings in relevant applications, e.g. pellicles or microelectronics.
