FC Spectrometer

Research project

 Project number: NNNL_V48
Title: Flying Circus Spectrometer for characterization of EUV light sources from UV to soft x-ray wavelengths
Acronym: ‘FC Spectrometer’
Project leader: Dr. M. Bayraktar (m.bayraktar@utwente.nl)
Project team: Prof. Dr. F. Bijkerk, Dr. B. Bastiaens, Dr. M. Bayraktar, Dr. B. Vratzov, C. Bruineman
Researcher: Dr. M. Bayraktar
Industrial partners: ASML

Aim of the project

Extreme UV light sources are of paramount interest for a number of high tech applications, including EUV photolithography. The EUV sources for photolithography are designed to emit strongly in a narrow wavelength band around 13.5 nm. Inherently, they also emit radiation outside the desired band, i.e. out-of-band radiation. Knowledge about the out-of-band radiation is vital because this parasitic radiation can be detrimental for the patterning of the fine features in next generation IC fabrication. The major problem of determining the out-of-band issue is that knowledge of this radiation is missing due to the lack of an appropriate spectrometer. Such a device should cover the full range from the EUV (13.5 nm) to the UV (~390 nm). This project aims to develop a compact transmission grating based spectrometer that solves this problem as it allows to measure this full spectrum with high precision and detail. With this spectrometer, for the first time a comprehensive spectral diagnosis becomes possible allowing critical light source optimization for higher in-band powers and reduced out-of-band radiation.