The research group XUV Optics of the Faculty Science and Technology of the University of Twente is involved in different aspects of science and technology.
Our Research themes are:
- Multilayer design and growth
- 'Advanced’ layer growth and (EUV) Plasma-driven physics and surface chemistry at elevated temperatures
- Transmission gratings
- Piezoelectric thin films
- Surface chemistry or surface interaction
- Xray metrology of thin films
The research is focussed on the following activities
1. Multilayer design and growth
We design, deposit, and characterize multilayer Bragg structures for a broad range of wavelengths. Our focus is on exploring the growth physics and atomic-scale interactions at interfaces, which determine crucial properties of the multilayers. The ultimate goal is on enhancing reflectance and thermal stability, but also precise control of the angular and spectral response of the Bragg optics.
For more information, please contact Dr. Andrey Yakshin.
Associated assignment
2. 'Advanced’ layer growth and (EUV) plasma-driven physics and surface chemistry at elevated temperatures
In this research theme, we investigate the advanced layer growth using PVD and CVD processes, (EUV) plasma-driven physics and (surface) chemistry at elevated temperatures for nanomaterials. This includes topics such as thin film layer growth, radical and plasma processes, development of new technology and device fabrication.
For more information, please contact Dr. Wesley van den Beld.
Associated assignments
3. Transmission gratings
In this research line, we investigate the deposition, characterization and analysis of piezoelectric thin films with a focus on exploring the structure-property relations for EUV relevant applications. Two concrete application examples that are intensively studied nowadays are adaptive EUV optics and active wafer clamps. The overall goal is to explore the fundamental material properties to develop piezoelectric actuators which are fast, energy efficient and sub-nanometer accurate.
For more information, please contact Dr. Muharrem Bayraktar.
Associated assignment
4. Piezoelectric THIN films
In this research line, we investigate the deposition, characterization and analysis of piezoelectric thin films with a focus on exploring the structure-property relations for EUV relevant applications. Two concrete application examples that are intensively studied nowadays are adaptive EUV optics and active wafer clamps. The overall goal is to explore the fundamental material properties to develop piezoelectric actuators which are fast, energy efficient and sub-nanometer accurate.
For more information, please contact Dr. Muharrem Bayraktar.
Associated assignments
5. Surface chemistry or surface interaction
In this research team we study the interaction of thin film coating materials with gases, plasma, ions and photons. We study for instance chemical modifications and morphology changes and use this knowledge to design materials and operating conditions that enhance the lifetime of optical coatings in applications.
For more information, please contact Dr. Marko Sturm.
Associated assignments
6. Xray metrology of thin films
For more information, please contact Dr. Robbert van de Kruijs.