PHD DEFENCE ZOI BOUZA | DEVELOPMENTS FOR BROADBAND SPECTRAL AND SPATIAL CHARACTERIZATION OF TIN PLASMA LIGHT SOURCES FOR EUV LITHOGRAPHY

Programme

PhD defence by Z. Bouza

PhD Faculty of Science

Supervisors:

• dr. O.O. Versolato
• prof.dr. W.M.G. Ubachs
• prof.dr.ir. R.A. Hoekstra
• dr. M. Bayraktar

Starting date: 6 October 2023

Time: 11:45 - 13:15

Location: VU Aula

Address: De Boelelaan 1105, 1081 HV Amsterdam

Follow the defence online : Go to livestream