Publications on Piezo MEMS over the years
[1]. Minh D. Nguyen, Evert P. Houwman, Matthijn Dekkers, Chi T. Q. Nguyen, Hung N. Vu, and Guus Rijnders, Enhanced energy storage density and energy efficiency of epitaxial Pb0.9La0.1(Zr0.52Ti0.48)O3 relaxor-ferroelectric thin-films deposited on silicon by pulsed laser deposition, APL Mater. 4 (2016) 080701; http://dx.doi.org/10.1063/1.4961636
[2]. Minh D. Nguyen, Huiyu Yuan, Evert P. Houwman, Matthijn Dekkers, Gertjan Koster, Johan E. ten Elshof, Guus Rijnders, Highly Oriented Growth of Piezoelectric Thin Films on Silicon using Two-Dimensional Nanosheets as Growth Template Layer, ACS Appl. Mater. Interfaces 8 (2016) 31120−31127; http://dx.doi.org/10.1021/acsami.6b09470
[3]. Minh D. Nguyen, Evert Houwman, Matthijn Dekkers, Darrell Schlom, and Guus Rijnders, Enhancement of figure of merit for energy-harvesters based on free-standing epitaxial Pb(Zr0.52Ti0.48)0.99Nb0.01O3 thin-film cantilevers, APL Mater. 5 (2017) 074201; http://doi.org/10.1063/1.4978273
[4]. Minh D. Nguyen, Evert P. Houwman, Matthijn Dekkers, and Guus Rijnders, Strongly Enhanced Piezoelectric Response in Lead Zirconate Titanate Films with Vertically-Aligned Columnar Grains, ACS Appl. Mater. Interfaces 9 (2017) 9849-9861;
http://dx.doi.org/10.1021/acsami.6b16470
[5]. Minh D. Nguyen, Evert P. Houwman, and Guus Rijnders, Large piezoelectric strain with ultra-low strain hysteresis in highly c-axis oriented Pb(Zr0.52Ti0.48)O3 films with columnar growth on amorphous glass substrates, Scientific Reports 7 (2017) 12915; https://www.nature.com/articles/s41598-017-13425-w
[6]. Minh D. Nguyen, Evert P. Houwman, Huiyu Yuan, Ben J. Wylie-van Eerd, Matthijn Dekkers, Gertjan Koster, Johan E. ten Elshof and Guus Rijnders, Controlling Piezoelectric Responses in Pb(Zr0.52Ti0.48)O3 Films through Deposition Conditions and Nanosheet Buffer Layers on Glass, ACS Appl. Mater. Interfaces 9 (2017) 35947–35957; http://doi.org/10.1021/acsami.7b07428
[7]. Minh D. Nguyen, Chi T. Q. Nguyen, Hung N. Vu, and Guus Rijnders, Controlling microstructure and film growth of relaxor-ferroelectric thin films for high break-down strength and energy-storage performance, J. Eur. Ceram. Soc. 38 (2018) 95-103; https://doi.org/10.1016/j.jeurceramsoc.2017.08.027