Infrastructure:
- Analysis Lab, to test functional properties of the devices
- Fabrication, full processing line for piezoMEMS in the MESA+ NanoLab
- Modeling and design, simulation of mechanical, electrical, fluidic, acoustic and other properties. Waferscale design
- System integration, on-chip electronics, ASICs and packaging
Knowledge:
- Piezoelectric thin films, novel materials, such as lead-free piezoelectric materials and
- Alternative device geometries, for instance free-standing MEMS, additional layers