Piezo MEMS and applications

PiezoMEMS are Micro Electro Mechanical Systems in which piezoelectricity is used as actuation and sensing mechanism. Piezoelectricity is one of the main actuation mechanism in MEMS devices, next to electrostatic or magnetic actuation. Piezoelectric actuation allows low voltages and low-power operation, robust mechanical design. Also sensing functionality can be integrated easily.

A number of products could benefit from the integration of piezoelectric materials: