Key-note presentations will be given by internationally recognised experts from both academia and industry. The topics will range from fundamental principles to simulation/modelling of processes, hardware design, and various applications. The preliminary programme is:
Confirmed talks
- Dr. Thomas Tillocher (Université d'Orléans): title to be announced
- Dr. Tomoyuki Nonaka (Samco Inc.): Advanced Plasma Etching for Photonic Integrated Circuit (PIC): III–V Semiconductor Etching, PhC etching, ALE, and Si DRIE Technologies
- Andrei Uvarov (Plasma-Therm/Corial): title to be announced
- Dr. Lucia Romano (Paul Scherrer Institute): MacEtch fundamentals: from wet to gas etching & Metal-assisted chemical etching: a new dry etch process for high aspect ratio silicon nanostructures
- To be announced (Memsstar): Hardware development new vapour MacEtch tool
- Manuela Lötsch (Scia Systems GmbH): title to be announced
- Kyrill Koekenberg (Trymax Semiconductors): title to be announced