A.J. Nijdam, J.W. Berenschot, J. van Suchtelen, J.G.E. Gardeniers and M. Elwenspoek
Velocity sources as an explanation for experimentally observed variations in Si {111} etch rates
Journal of Micromechanics and Microengineering 9 (1999) pp. 135-138.
A.J. Nijdam, J. van Suchtelen, J.W. Berenschot, J.G.E. Gardeniers and M. Elwenspoek
Etching of silicon in alkaline solutions: a critical look at the {111} minimum
Journal of Crystal Growth 198-199 (1999) pp. 430-434.
C. Gui, G.J. Veldhuis, T.M. Koster, P.V. Lambeck, J.W. Berenschot, J.G.E. Gardeniers and M. Elwenspoek
Fabrication of nanomechanical optical devices with aligned wafer bonding
Microsystem Technologies 5 (1999) pp. 138-143.
C. Gui, M. Elwenspoek, N.R. Tas and J.G.E. Gardeniers
The effect of surface roughness on direct wafer bonding
Journal of Applied Physics 85 (1999) pp. 7448-7454.