Publications | Mesoscale Chemical Systems (MCS)

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2005

Design of miniaturized fermentors for high thoughput optimization of industrial fermentations (2005)[Contribution to conference › Paper] 8th Annual European Conference on Micro & Nanoscale Technologies for the Biosciences, Nanotech 2004. Krommenhoek, E. E., Gardeniers, J. G. E., van den Berg, A., Li, X., Li, X., Ottens, M. M., van der Wielen, L. A. M., van Dedem, G. W. K., van Leeuwen, M. G., van Gulik, W. M. & Heijnen, J. J.Evaluation of the viability of HL60 cells in contact with commonly used microchip materials (2005)In MicroTAS 2005 Conference - 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences (pp. 1288-1290). Transducer Research Foundation, Inc.. Wolbers, F., ter Braak, P. M., le Gac, S., Lüttge, R., Andersson, H., Vermes, I. & van den Berg, A.Flow-through microfluidic chip for cell transfection by electropermeabilization (2005)In MicroTAS 2005 Conference - 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences (pp. 1395-1397). Transducer Research Foundation, Inc.. Valero, A., Lüttge, R., van Nieuwkasteele, J. W., Andersson, H. & van den Berg, A.Improving liquid chromatography efficiency: channels structured with micro-pillars (2005)In MicroTAS 2005 Conference - 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences (pp. 838-840) (Micro total analysis systems 2005; Vol. 2). Transducer Research Foundation. De Pra, M., Kok, W. T., Gardeniers, J. G. E., Desmet, G. & Schoenmakers, P. J.Planar Nanoneedles on-chip for intracellular measurements (2005)In Proceedings of microTAS 2005 Conference (pp. 400-402). Transducers Research Foundation, Inc.. Emmelkamp, J., Gardeniers, J. G. E., Andersson, H. & van den Berg, A.Extending the functionalities of shear-driven chromatography nano-channels using high aspect ratio etching (2005)In MicroTAS 2005 - 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences (pp. 106-108). Transducer Research Foundation, Inc.. de Malsche, W., Clicq, D., Eghbali, H., Vervoort, N., Gardeniers, J. G. E., van den Berg, A. & Desmet, G.Field-effect control of electro-osmotic flow in microfluidic networks (2005)Colloids and surfaces A: Physicochemical and engineering aspects, 267(1-3), 110-116. van der Wouden, E. J., Heuser, T., Hermes, D. C., Oosterbroek, R. E., Gardeniers, J. G. E. & van den Berg, A.https://doi.org/10.1016/j.colsurfa.2005.06.048A new pulsed electric field microreactor: comparison between the laboratory and microtechnology scale (2005)Lab on a chip, 5(9), 943-948. Fox, M., Esveld, E., Lüttge, R. & Boom, R.https://doi.org/10.1039/b503704bMicrochip analysis of lithium in blood using moving boundary electrophoresis and zone electrophoresis (2005)Electrophoresis, 26(15), 3032-3042. Vrouwe, E. X., Lüttge, R., Olthuis, W. & van den Berg, A.https://doi.org/10.1002/elps.200500012Method for Manufacturing a Nanostructure (2005)[Patent › Patent] (Submitted). Sarajlic, E. & Berenschot, J. W.https://patents.google.com/patent/WO2005061377A1/en?oq=WO+2005%2f061377+A1Monitoring of yeast cell concentration using a micromachined impedance sensor (2005)In The 13th International Conference on Solid-StateSensors, Actuators and Microsystems, (Transducers 2005) (pp. 283-286). IEEE. Krommenhoek, E. E., Gardeniers, J. G. E., Bomer, J. G., van den Berg, A., Li, X., Ottens, M., van der Wielen, L. A. M., van Dedem, G. W. K., van Leeuwen, M., van Gulik, W. M. & Heijnen, J. J.https://doi.org/10.1109/SENSOR.2005.1496412Barrier properties of ALD1,5N thin films (2005)In International Conference on Advanced Metallization (pp. 769-774). Materials Research Society. van Nieuwkasteele-Bystrova, S. N., Holleman, J., Aarnink, A. A. I. & Wolters, R. A. M.Atomic layer deposition of W_1.5N barrier films for Cu Metallization (2005)Journal of the Electrochemical Society, 152(7), G522-527. van Nieuwkasteele-Bystrova, S. N., Aarnink, A. A. I., Holleman, J. & Wolters, R. A. M.https://doi.org/10.1149/1.1928171Preparation of palladium-silver alloy films by a dual-sputtering technique and its application in hydrogen separation membrane (2005)Thin solid films, 479(1-2), 89-94. Tong, H. D., van den Berg, A. H. J., Gardeniers, J. G. E., Jansen, H. V., Gielens, F. C. & Elwenspoek, M. C.https://doi.org/10.1016/j.tsf.2004.11.179Fabrication of a high-temperature microreactor with integrated heater and sensor patterns on an ultrathin silicon membrane (2005)Sensors and Actuators A: Physical, 119(1), 196-205. Tiggelaar, R. M., Berenschot, J. W., van Male, P., Oosterbroek, R. E., Gardeniers, J. G. E., de Croon, M. H. J. M., Schouten, J. C., van den Berg, A. & Elwenspoek, M. C.https://doi.org/10.1016/j.sna.2004.09.004Microsieve supporting palladium-silver alloy membrane and application to hydrogen separation (2005)Journal of microelectromechanical systems, 14(1), 113-123. Tong, D. H., Gielens, F. C., Gardeniers, J. G. E., Jansen, H. V., Berenschot, J. W., de Boer, M. J., de Boer, J. H., van Rijn, C. J. M. & Elwenspoek, M. C.https://doi.org/10.1109/JMEMS.2004.839005A maldi-chip integrated system with a monitoring window (2005)Lab on a chip, 5(4), 378-381. Brivio, M., Tas, N. R., Goedbloed, M. H., Gardeniers, J. G. E., Verboom, W., van den Berg, A. & Reinhoudt, D.https://doi.org/10.1039/b418986hApoptotic cell death dynamics of HL60 cells studied using a microfluidic cell trap device (2005)Lab on a chip, 5(1), 49-55. Valero, A., Merino, F., Wolbers, F., Lüttge, R., Vermes, I., Andersson, H. & van den Berg, A.https://doi.org/10.1039/b415813jFabrication and characterization of high-temperature microreactors with thin film heater and sensor patterns in silicon nitride tubes (2005)Lab on a chip, 5(3), 326-336. Tiggelaar, R. M., Berenschot, J. W., de Boer, J. H., Sanders, R. G. P., Gardeniers, J. G. E., Oosterbroek, R. E., van den Berg, A. & Elwenspoek, M. C.https://doi.org/10.1039/b414857fMeasuring reaction kinetics in a lab-on-a-Chip by microcoil NMR (2005)Lab on a chip, 5(3), 280-284. Wensink, H., Benito-Lopez, F., Hermes, D. C., Verboom, W., Gardeniers, H. J. G. E., Reinhoudt, D. N. & van den Berg, A.https://doi.org/10.1039/b414832kMicrofabrication and integration (2005)In Separation methods in microanalytical systems (pp. 55-106). CRC Press (Taylor & Francis). Gardeniers, J. G. E. & van den Berg, A.Microfabrication and integration - Separation methods in microanalytical systems (2005)In Separation Methods in Microanalytical Systems (pp. 55-106) (Microfabrication and Integration). Taylor & Francis. Gardeniers, J. G. E. & van den Berg, A.Optical fiber-based-o-line UV/V is spectroscopic monitoring of chemical reaction kinetics under high pressure in a capillary microreactor (2005)Chemical communications, 2005(22), 2857-2859. Benito-Lopez, F., Verboom, W., Kakuta, M., Gardeniers, J. G. E., Egberink, R. J. M., Oosterbroek, R. E., van den Berg, A. & Reinhoudt, D.https://doi.org/10.1039/b500429bPlanar Nanoneedles on-chip for intracellular measurements (2005)In MicroTAS 2005 Conference -9th International Conference on Miniaturized Systems for Chemistry and Life Sciences (pp. 400-402) (Micro total analysis systems 2005). Transducer Research Foundation. Emmelkamp, J., Gardeniers, J. G. E., Andersson, H. & van den Berg, A.

2004

Diffusion barriers for Cu metallisation in Si integrated circuits: deposition and related thin film properties (2004)[Thesis › PhD Thesis - Research UT, graduation UT]. University of Twente. van Nieuwkasteele-Bystrova, S. N.Fabrication and mechanical testing of glass chips for high pressure synthetic or analytical chemistry (2004)In Proceedings of the Third International Symposium on Semiconductor Wafer Bonding: Physics and Applications. Electrochemical Society. Oosterbroek, R. E., Hermes, D. C., Kakuta, M., Benito-Lopez, F., Verboom, W., Gardeniers, J. G. E. & van den Berg, A.Fabrication of microfluidic networks with integrated electrodes, using CMP and glass-to-SiO2 thermal wafer bonding (2004)In Workshop on wafer bonding for MEMS technologies (pp. 63-64). Hermes, D. C., Heuser, T., van der Wouden, E. J., Gardeniers, J. G. E. & van den Berg, A.Apoptosis induced kinetic changes in autofluorescence of HL60cells - application for single cell analysis on chip (2004)In Proceedings MicroTAS 2004 (pp. 563-565). Wolbers, F., Valero, A., Andersson, H., Lüttge, R., Vermes, I. & van den Berg, A.Sampling for point-of-care analysis of whole blood with microchip CE (2004)In Micro Total Analysis Systems 2004 (pp. 503-505). Royal Society of Chemistry. Vrouwe, E. X., Lüttge, R. & van den Berg, A.Micro- and Nanofluidic Devices for Environmental and Biomedical Applications (2004)In Proceedings of the 6th Euroconference on Environmental Analytical Chemistry (pp. 809-819). Gardeniers, J. G. E., van den Berg, A. & Rosenberg, E.Design of miniaturized fermentors for high throughput optimization of industrial fermentations (2004)In Book of abstracts 5th European Symposium on Biochemical Engineering Sciences (pp. 74-74). Gardeniers, J. G. E., Krommenhoek, E. E., van den Berg, A., Li, X., Ottens, M. M., van der Wielen, L. A. M., van Dedem, G. W. K., van Leeuwen, M. G., van Gulik, W. M. & Heijnen, J. J.Cell permeabilisation and transport focused around oscillating microbubbles (2004)In Mechanics of the 21st century: 21st International Congress of Theoretical and Applied Mechanics (pp. -). Springer. Marmottant, P. G. M., Hilgenfeldt, S., Versluis, M., Gardeniers, J. G. E., van den Berg, A. & Lohse, D.http://extras.springer.com/2005/978-94-007-8907-4/ebookMicrofabricated palladium-silver alloy membranes and their application in hydrogen separation (2004)Industrial & engineering chemistry research, 43(15), 4182-4187. Tong, D. H., Gielens, F. C., Gardeniers, J. G. E., Jansen, H. V., van Rijn, C. J. M., Elwenspoek, M. C. & Nijdam, W.https://doi.org/10.1021/ie034293rField-effect control of electro-osmotic flow in microfluidic networks (2004)In Abstract book International Electrokinetics Conference (pp. 37-37). van der Wouden, E. J., Heuser, T., Hermes, D. C., Gardeniers, J. G. E. & van den Berg, A.Microfluid apparatus for e.g. MEMS applications, comprises gas bubble holder, ultrasound transducer and passive flow element inside liquid vessel (2004)[Patent › Patent] (Submitted). Marmottant, P. G. M., Hilgenfeldt, S. & Gardeniers, J. G. E.http://v3.espacenet.com/publicationDetails/biblio?CC=NL&NR=1026321C2&KC=C2&FT=D&date=20051206&DB=&locale=Thermal and mechanical analysis of a microreactor for high temperature catalytic gas phase reactions (2004)Sensors and Actuators A: Physical, 112(2-3), 267-277. Tiggelaar, R. M., Loeters, P. W. H., van Male, P., Oosterbroek, R. E., Gardeniers, J. G. E., de Croon, M. H. J. M., Schouten, J. C., Elwenspoek, M. C. & van den Berg, A.https://doi.org/10.1016/j.sna.2004.01.036Apoptosis induced kinetic changes in autofluorescence of HL60 cells - application for singele cell analysis on chip (2004)Nederlands tijdschrift voor klinische chemie en laboratoriumgeneeskunde, 29(5), 296-297. Wolbers, F., Valero, A., Andersson, H., Lüttge, R., van den Berg, A. & Vermes, I.Design and fabrication of a microfluidic chip for cell trapping (2004)In 15th Micromechanics Europe workshop (pp. -). Valero, A., Demierre, N., Lüttge, R., van Nieuwkasteele, J. W. & van den Berg, A.Direct measurement of lithium in whole blood using a capillary electrophoresis microchip (2004)Nederlands tijdschrift voor klinische chemie en laboratoriumgeneeskunde, 29(5), 295-296. Vrouwe, E. X., Lüttge, R., Kölling, P. & van den Berg, A.http://www.nvkc.nl/publicaties/documents/2004-5-p295-296.pdfDirect measurement of lithium in whole blood using a glass chip with integrated conductivity detection for capillary electrophoresis (2004)Nederlands tijdschrift voor klinische chemie en laboratoriumgeneeskunde, 29(2), 94-94. Vrouwe, E. X., Kölling, P., Lüttge, R. & van den Berg, A.Direct measurement of lithium in whole blood using microchip capillary electrophoresis with integrated conductivity detection (2004)Electrophoresis, 25(10-11), 1660-1667. Vrouwe, E. X., Lüttge, R. & van den Berg, A.https://doi.org/10.1002/elps.200405885Lab-on-a-Chip systems for biomedical and environmental monitoring (2004)Analytical and bioanalytical chemistry, 378(7), 1700-1703. Gardeniers, J. G. E. & van den Berg, A.https://doi.org/10.1007/s00216-003-2435-7Lab-on-a-Chip-Electroporation Assay using Propidium Iodide (2004)In Nanotech 2004 (pp. -). Valero, A., Lüttge, R., Merino, F., Sprenkels, A. J. & van den Berg, A.Micro and nanofluidic devices for environmental and biomedical applications (2004)International journal of environmental analytical chemistry, 84(11), 809-819. Gardeniers, J. G. E. & van den Berg, A.https://doi.org/10.1080/03067310310001626678

2003

Microfabrication of palladium-silver alloy membranes for hydrogen separation (2003)Journal of microelectromechanical systems, 12(5), 622-629. Tong, D. H., Berenschot, J. W., de Boer, M. J., Gardeniers, J. G. E., Wensink, H., Jansen, H. V., Nijdam, W., Nijdam, A. J., Elwenspoek, M. C., Gielens, F. C. (. & van Rijn, C. J. M.https://doi.org/10.1109/JMEMS.2003.818458Atomic Layer Deposition of W-based layers on SiO₂ (2003)In Proceedings of Semiconductor Advances for Future Electronics, SAFE 2003 (pp. 730-734). STW. Bystrova, S., Holleman, J., Wolters, R. A. M. & Aarnink, A. A. I.Pirani pressure sensor with distributed temperature measurement (2003)In Proceedings of IEEE Sensors 2003 (pp. 718-722). IEEE. de Jong, B. R., Bula, W. P., Zalewski, D. R., van Baar, J. J. J. & Wiegerink, R. J.https://doi.org/10.1109/ICSENS.2003.1279033Microneedle Array Interface to CE on Chip (2003)In Proceedings microTAS 2003 (pp. 511-514). Transducers Research Foundation, Inc.. Lüttge, R., Gardeniers, J. G. E., Vrouwe, E. X. & van den Berg, A.Thin, strong and defect free microfabricated palladium composite membranes for hydrogen separation (2003)In Proceedings of international conference on microreaction technology (IMRET 7) (pp. 343-345). Tong, D. H., Gielens, F. C., Hoang Thi Hanh, H. T. H., Gardeniers, J. G. E., Jansen, H. V., Nijdam, W., van Rijn, C. J. M. & Elwenspoek, M. C.A low hydraulic capacitance pressure sensor for integration with a micro viscosity detector (2003)Sensors and Actuators B: Chemical, 92(1-2), 102-109. van der Heyden, F. H. J., Blom, M. T., Gardeniers, J. G. E., Chmela, E., Elwenspoek, M. C., Tijssen, R. P. & van den Berg, A.https://doi.org/10.1016/S0925-4005(03)00099-6Analysis systems for the detection of ammonia based on micromachined components modular hybrid versus monolithic integrated approach (2003)Sensors and actuators, 92(1-2), 25-36. Tiggelaar, R. M., Veenstra, T. T., Sanders, R. G. P., Berenschot, E., Gardeniers, H., Elwenspoek, M., Prak, A., Mateman, R., Wissink, J. M. & van den Berg, A.https://doi.org/10.1016/S0925-4005(03)00127-8A hydrogen separation module based on wafer-scale micromachined palladium-silver alloy membranes (2003)In 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 (pp. 1742-1745). IEEE. Tong, D. H., Gielens, F. C., Hoang Thi Hanh, H. T. H., Berenschot, J. W., de Boer, M. J., Gardeniers, J. G. E., Jansen, H. V., Nijdam, W., van Rijn, C. J. M. & Elwenspoek, M. C.https://doi.org/10.1109/SENSOR.2003.1216921Comparison of capillary zone electrophoresis performance of powder-blasted and hydrogen fluoride-etched microchannels in glass (2003)Electrophoresis, 24(1-2), 162-171. Pu, Q., Lüttge, R., Gardeniers, J. G. E. & van den Berg, A.https://doi.org/10.1002/elps.200390009Lab-on-a-Chip Systems for Biomedical and Environmental Monitoring (2003)International Journal of Computational Methods in Engineering Science and Mechanics, 4(2), 157-161. Gardeniers, J. G. E. & van den Berg, A.https://doi.org/10.1142/S1465876303000831Microelectroporation chip for single cell analysis (2003)In Nanotech 2003 (pp. -). Valero, A., Lüttge, R., van Nieuwkasteele, J. W., Andersson, H. & van den Berg, A.Silicon and glass micromachining for μTAS (2003)In Lab-on-a-Chip: Miniaturized Systems for (BIO)Chemical Analysis and Synthesis (pp. 37-64). Elsevier. Gardeniers, J. G. E.https://doi.org/10.1016/B978-044451100-3/50003-6Silicon micromachined hollow microneedles for transdermal liquid transport (2003)Journal of microelectromechanical systems, 12(6), 855-862. Gardeniers, J. G. E., Lüttge, R., Berenschot, J. W., de Boer, M. J., Yeshurun, S. Y., Hefetz, M., van 't Oever, R. & van den Berg, A.https://doi.org/10.1109/JMEMS.2003.820293

2002

2001

HDC-chip: an integrated micromachined separation system for polymers and particles (2001)In Proceedings of Micro Total Analysis System (MicroTAS) (pp. 646-648) (MESA monographs). Kluwer Academic Publishers. Chmela, E., Gardeniers, J. G. E., Tijssen, R. P. & Blom, M. T.Magneto-hydrodynamically (MHD) directed flow in microfluidic networks (2001)In Proceedings of the MicroTAS 2001 Symposium, Monterey, CA, USA (pp. 577-578) (MESA monographs). Kluwer Academic Publishers. Schasfoort, R. B. M. & Lüttge, R.Monolithic versus modular integration of a micro-fia system for ammonium determination (2001)In Proceedings of Micro Total Analysis Systems Conference (MicroTAS) (pp. 664-666) (MESA monographs). Kluwer Academic Publishers. Veenstra, T. T., Tiggelaar, R. M., Sanders, R. G. P., Berenschot, J. W., Gardeniers, J. G. E., Wissink, J., Mateman, R., Elwenspoek, M. C. & van den Berg, A.Influence of the angle between etched (near) Si{111} surfaces and the substrate orientation on the underetch rate during anisotropic wet-chemical etching of silicon (2001)Journal of micromechanics and microengineering, 11(5), 499-503. Nijdam, A. J., Gardeniers, J. G. E., Berenschot, J. W., van Veenendaal, E., van Suchtelen, J. & Elwenspoek, M.https://doi.org/10.1088/0960-1317/11/5/308Local anodic bonding of Kovar to Pyrex aimed at high-pressure, solvent-resistant microfluidic connections (2001)Journal of micromechanics and microengineering, 11(4), 382-385. Blom, M. T., Chmela, E., Gardeniers, J. G. E., Berenschot, J. W., Elwenspoek, M. C., Tijssen, R. & van den Berg, A.https://doi.org/10.1088/0960-1317/11/4/317Design and fabrication of a hydrodynamic chromatography chip (2001)In Proceedings of Transducers 2001 Conference (pp. 794-797). Blom, M. T., Chmela, E., Gardeniers, J. G. E., Tijssen, R. P., Elwenspoek, M. C. & van den Berg, A.A light absorption cell for microTAS with KOH/IPA etched 45 degrees mirrors in silicon (2001)In Proceedings of Sensor Technology 2001 Conference (pp. 137-142) (MESA monographs). Kluwer. Tiggelaar, R. M., Veenstra, T. T., Sanders, R. G. P., Gardeniers, J. G. E., Elwenspoek, M. C. & van den Berg, A.A simple selfpriming bubble-tolerant peristaltic micropump (2001)In Proceedings of Sensor Technology 2001 Conference (pp. 125-129) (MESA monographs). Kluwer. Veenstra, T. T., Berenschot, J. W., Sanders, R. G. P., Gardeniers, J. G. E. & van den Berg, A.Formation and stabilization of pyramidal etch hillocks on silicon {100} in anisotropic etchants: Experiments and Monte Carlo simulation (2001)Journal of Applied Physics, 89(89), 4113-4123. Nijdam, A. J., van Veenendaal, E., Cuppen, H. M., van Suchtelen, J., Reed, M. L., Gardeniers, J. G. E., van Enckevort, W. J. P., Vlieg, E. & Elwenspoek, M. C.https://doi.org/10.1063/1.1352557Failure mechanisms of pressurized microchannels, model, and experiments (2001)Journal of microelectromechanical systems, 10(1), 158-164. Blom, M. T., Tas, N. R., Pandraud, G., Gardeniers, J. G. E., Chmela, E., Berenschot, J. W., Elwenspoek, M. C., Tijssen, R. & van den Berg, A.https://doi.org/10.1109/84.911105Growth and properties of LPCVD W-Si-N barrier layers (2001)Microelectronic engineering, 55(1-4), 189-195. Bystrova, S., Holleman, J. & Woerlee, P. H.https://doi.org/10.1016/S0167-9317(00)00447-0169 Kelvin cryogenic microcooler employing a condenser, evaporator, flow restriction and counterflow heat exchangers (2001)In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) (pp. 418-421). IEEE. Burger, J. F., Holland, H. J., Berenschot, J. W., Seppenwolde, J.-H., ter Brake, H. J. M., Gardeniers, J. G. E. & Elwenspoek, M. C.https://doi.org/10.1109/MEMSYS.2001.906567Use of selective anodic bonding to create micropump chambers with virtually no dead volume (2001)Journal of the Electrochemical Society, 148(2), G68-G72. Veenstra, T. T., Berenschot, J. W., Gardeniers, J. G. E., Sanders, R. G. P., Elwenspoek, M. C. & van den Berg, A.https://doi.org/10.1149/1.1339873

2000

1999

The use of selective anodic bonding to create near-zero dead volume membranes (1999)In Proceedings of the 1999 joint international meeting (pp. 998-). Veenstra, T. T., Berenschot, J. W., Gardeniers, J. G. E., Sanders, R. G. P., Elwenspoek, M. C. & van den Berg, A.Velocity sources as an explanation for experimentally observed variations in Si{111} etch rates (1999)Journal of micromechanics and microengineering, 9(9), 135-138. Nijdam, A. J., Berenschot, J. W., van Suchtelen, J., Gardeniers, J. G. E. & Elwenspoek, M. C.https://doi.org/10.1088/0960-1317/9/2/008The effect of surface roughness on direct wafer bonding (1999)Journal of Applied Physics, 85(10), 7448-7454. Gui, C., Elwenspoek, M. C., Tas, N. R. & Gardeniers, J. G. E.https://doi.org/10.1063/1.369377Etching of silicon in alkaline solutions: A critical look at the {111} minimum (1999)Journal of crystal growth, 198-199(1), 430-434. Nijdam, A. J., van Suchtelen, J., Berenschot, J. W., Gardeniers, J. G. E. & Elwenspoek, M.https://doi.org/10.1016/S0022-0248(98)01032-XFabrication of nanomechanical optical devices with aligned wafer bonding (1999)Microsystem technologies, 5(5), 138-143. Gui, C., Veldhuis, G. J., Koster, T. M., Lambeck, P., Berenschot, J. W., Gardeniers, J. G. E. & Elwenspoek, M. C.https://doi.org/10.1007/s005420050153High pressure check valve for application in a miniature cryogenic sorption cooler (1999)In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) (pp. 183-188). IEEE. Burger, J. F., van der Wekken, M. C., Berenschot, J. W., Holland, H. J., ter Brake, H. J. M., Rogalla, H., Gardeniers, J. G. E. & Elwenspoek, M. C.https://doi.org/10.1109/MEMSYS.1999.746803Simulation of anisotropic wet-chemical etching using a physical model (1999)In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) (pp. 332-337). IEEE. van Suchtelen, J., Sato, K., van Veenendaal, E., Nijdam, A. J., Gardeniers, J. G. E., van Enckevort, W. J. P. & Elwenspoek, M. C.https://doi.org/10.1109/MEMSYS.1999.746850The Surface adhesion parameter: A measure for wafer bondability (1999)In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) (pp. 290-295). IEEE. Gui, C., Elwenspoek, M. C., Tas, N. R. & Gardeniers, J. G. E.https://doi.org/10.1109/MEMSYS.1999.746839

1998

Fabrication of multi-layer substrates for high aspect ratio single crystalline microstructures (1998)Sensors and Actuators A: Physical, 70(1-2), 61-66. Gui, C., de Boer, M. J., Gardeniers, J. G. E., Jansen, H. V., Berenschot, J. W. & Elwenspoek, M. C.https://doi.org/10.1016/S0924-4247(98)00113-7Mechano-optical waveguide on-off intensity modulator (1998)Optics letters, 23(19), 1532-1534. Veldhuis, G. J., Gui, C., Nauta, T., Koster, T. M., Berenschot, J. W., Lambeck, P. V., Gardeniers, J. G. E. & Elwenspoek, M. C.https://doi.org/10.1364/OL.23.001532Present and future role of CMP in wafer bonding (1998)In Proceedings of the fourth International Symposium on Semiconductor wafer bonding: science, technology and applications (pp. 114-126). Gui, C., Elwenspoek, M. C., Gardeniers, J. G. E. & Lambeck, P.The electrolysis of water: an actuation principle for MEMS with a big opportunity (1998)In Actuator 98: 6th International Conference on New Actuators with accompanying exhibition, conference proceedings, 17-19 June, 1998, Bremen, Germany (pp. 118-121). Messe Bremen GmbH. Neagu, C., Jansen, H., Gardeniers, H. & Elwenspoek, M.https://www.tib.eu/en/search/id/BLCP%3ACN033436646/The-Electrolysis-of-Water-An-Actuation-Principle/Velocity sources as an explanation for experimentally observed variations in Si{111} etch rates (1998)In Proceedings of the Micromechanics Europe 1998 Conference (MME) (pp. 74-77). Nijdam, A. J., Berenschot, J. W., van Suchtelen, J., Gardeniers, J. G. E. & Elwenspoek, M. C.Present and future role of chemical mechanical polishing in wafer bonding (1998)Journal of the Electrochemical Society, 145(6), 2198-2204. Gui, C., Elwenspoek, M. C., Gardeniers, J. G. E. & Lambeck, P.https://doi.org/10.1149/1.1838616Electrochemical Fabrication of Multi Walled Micro Channels (1998)In Micro Total Analysis Systems ’98: Proceedings of the uTAS ’98 Workshop, held in Banff, Canada, 13–16 October 1998 (pp. 133-136). Kluwer Academic Publishers. Tjerkstra, R. W., Gardeniers, J. G. E., Elwenspoek, M. C. & van den Berg, A.https://doi.org/10.1007/978-94-011-5286-0_32Nanomechanical optical devices fabricated with aligned wafer bonding (1998)In The Eleventh Annual International Workshop on Micro Electro Mechanical Systems, MEMS 98 Proceedings (pp. 482-487). IEEE. Gui, C., Veldhuis, G. J., Koster, T. M., Lambeck, P., Berenschot, J. W., Gardeniers, J. G. E. & Elwenspoek, M. C.https://doi.org/10.1109/MEMSYS.1998.659805Direct measurement of piezoelectric properties of Sol-Gel PZT films (1998)Journal of the Korean Physical Society, 32(32), S1573-S1577. Gardeniers, J. G. E., Verholen, A. G. B. J., Verholen, A. G. B. J., Tas, N. R. & Elwenspoek, M. C.

1997

1996

Silicon fusion bonding of rough surface with polishing technique (1996)In Proceedings of micro system technologies '96 (pp. 205-210). VDE Verlag. Gui, C., Albers, H., Gardeniers, J. G. E., Elwenspoek, M. C. & Lambeck, P.Characterisation of a planar microcoil for implantable microsystems (1996)In Proceedings of Eurosensors X, 10th European Conference on Solid-State Transducers (pp. 343-346). Rusu, C. R., Smith, A., Gardeniers, J. G. E., Elwenspoek, M. C. & Fluitman, J. H. J.Porous silicon bulk micromachining for thermally isolated mambrane formation (1996)In Proceedings of Eursensors X (pp. 227-230). Ducso, C., Vazsonyi, E., Adam, M., Barsony, I., Barsony, I., Gardeniers, J. G. E. & van den Berg, A.LPCVD silicon-rich silicon nitride films for applications in micromechanics, studied with statistical experimental design (1996)Journal of vacuum science & technology A: vacuum, surfaces, and films, 14(14), 2879-2892. Gardeniers, J. G. E., Tilmans, H. A. C. & Visser, C. C. G.https://doi.org/10.1116/1.580239An electrochemically actuated microvalve (1996)In ACTUATOR 96: conference proceedings: 5th International Conference on New Actuators, 26-28 June, 1996, Bremen, Germany (pp. 41-44). AXON Technology Consult. Neagu, C. R., Gardeniers, J. G. E., Elwenspoek, M. C. & Fluitman, J. H. J.Surface morphology of p-type (100) silicon etched in aqueous alkaline solution (1996)Journal of the Electrochemical Society, 143(5), 1744-1750. Bressers, P. M. M. C., Kelly, J. J., Gardeniers, J. G. E. & Elwenspoek, M. C.https://doi.org/10.1149/1.1836710Microstructure of pulsed-laser deposited PZT on polished and annealed MGO substrates (1996)[Contribution to conference › Paper] MRS Spring Meeting 1996. King, S. L., Coccia, L. G., Gardeniers, J. G. E. & Boyd, I. W.Design, fabrication and characterisation of a planar microcoil inductor for power supply in and data exchange with implantable microsystems (1996)In Proceedings 1996 National Sensor Conference (pp. 35-38). Platform "Sensor Technology. Smith, A., Rusu, C. R., Neagu, C., Gardeniers, J. G. E., Elwenspoek, M. C. & Fluitman, J. H. J.Electrochemical microvalve (1996)In Proceedings 1996 National Sensor Conference (pp. 21-24). Platform "Sensor Technology. Rusu, C. R., Neagu, C., Gardeniers, J. G. E., Elwenspoek, M. C. & Fluitman, J. H. J.Silicon fusion bonding with chemical mechanical polishing (1996)In Proceedings 1996 National Sensor Conference (pp. 93-97). Gui, C., Albers, H., Gardeniers, J. G. E., Elwenspoek, M. C. & Lambeck, P.A survey on the reactive ion etching of silicon in microtechnology (1996)Journal of micromechanics and microengineering, 6(1), 14-28. Jansen, H., Gardeniers, H., de Boer, M., Elwenspoek, M. & Fluitman, J.https://doi.org/10.1088/0960-1317/6/1/002An electrochemical microactuator: Principle and first results (1996)Journal of microelectromechanical systems, 5(1), 2-9. Neagu, C. R., Gardeniers, J. G. E., Elwenspoek, M. & Kelly, J. J.https://doi.org/10.1109/84.485209Thermally assisted ion beam etching of polytetrafluoroethylene a new technique for high aspect ratio etching of MEMS (1996)In Proceedings of the 1996 9th Annual International Workshop on Micro Electro Mechanical Systems (pp. 277-284). IEEE. Berenschot, E., Jansen, H., Burger, G.-J., Gardeniers, H. & Elwenspoek, M.https://doi.org/10.1109/MEMSYS.1996.493994Isotropically etched channels for gas chromatography (1996)Analytical methods and instrumentation, 247-249. Tjerkstra, R. W., Gardeniers, J. G. E., van den Berg, A. & Elwenspoek, M. C.