Publications 1998

J.G.E. Gardeniers, A.G.B.J. Verholen, N.R. Tas and M. Elwenspoek
Direct measurement of piezoelectric properties of sol-gel PZT films
Journal of the Korean Physical Society 32 (1998) pp. S1573-S1577.

J.G.E. Gardeniers, Z.M. Rittersma and G.J. Burger
Preferred orientation and piezoelectricity in sputtered ZnO films
Journal of Applied Physics 83 (1998) pp. 7844-7854.

C. Gui, M.J. de Boer, J.G.E. Gardeniers, H.V. Jansen, J.W. Berenschot and M. Elwenspoek
Fabrication of multi layer substrates for high aspect ratio single crystalline microstructures
Sensors & Actuators A 70 (1998) pp. 61-66.

C.Q. Gui, M. Elwenspoek, J.G.E. Gardeniers and P.V. Lambeck
Present and future role of Chemical Mechanical Polishing in wafer bonding
Journal of the Electrochemical Society 145 (1998) pp. 2198-2204.

G.J. Veldhuis, C. Gui, T. Nauta, T.M. Koster, J.W. Berenschot, P.V. Lambeck, J.G.E. Gardeniers and M. Elwenspoek
Mechano-optical waveguide on/off intensity switch
Optics Letters 23 (1998) pp. 1532-1534.