MESA+ University of Twente
Industrial focus group XUV Optics


Master assignment

Grazing incidence Small angle X-ray scattering: pushing thin film analysis to its limits.

Contact: dr. I. Makhotkin (

Grazing incidence small angle X-ray scattering (GI-SAXS) is an X-ray based technique that gives information about the structure of buried interfaces and nanoparticles. This is the only non-destructive technique that is capable to provide information on size and shape of buried nanoparticles and parameters of correlation of interfaces in layered nanostructures. The latest is an essential piece of information about the process of thin film growth. For a long time this technique was available only on synchrotrons or sophisticated GI-SAXS setups. Recently, a new optical scheme was realized by PANalytical that enable GI-SAXS measurements on a laboratory X-ray diffractometer. The topic of this research is an experimental test of the new GI-SAXS schemes. For this research we have a brand new, state-of-the-art PANalytical Empyrean X-ray diffractometer equipped with various X-ray mirrors for GI-SAXS measurements.

Schematic representation of GI-SAXS measurement scheme.