MESA+ University of Twente
Industrial focus group XUV Optics

Completed projects

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the SenterNovem funded project Advanced multilayer coatings for high volume EUV lithography (ACHieVE), with partners ASML, Carl Zeiss SMT AG, Philips Extreme UV GmbH, SAGEM, and Media Lario

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XUV Metrology, an STW Valorisation Grant project executed with Scientec Engineering

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FOM Programme 75, named PSI-lab: An integrated laboratory on plasma-surface interaction, a fusion research project partly executed within nSI

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Negating HIO-induced metal and carbide EUV surface contamination (No-HIO), a project funded by M2i and ASML

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Stability of EUV caps under reactive environments (SECURE-N), also through M2i and ASML

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a feasibility research project on XUV multilayer optics for XFEL, carried out at FLASH, Hamburg, and

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the Nanostructured Arrays project on laterally structured multilayer optics, executed mainly at MESA+