MESA+ University of Twente
Industrial focus group XUV Optics

Former PhD students

Former PhD students

Thesis

Roger Coloma Ribera (2017)

Growth and thermal oxidation of Ru and ZrO2 thin films as oxidation protective layers 

 

 

Dmitry Astakhov (2016)

Numerical study of extreme-ultra-violet generated plasmas in hydrogen

 

 

Sebastiaan Huber (2016)

Illuminating the structure of borides through X-ray absorption spectroscopy

 

 

An Gao (2015)

Analysis of extreme ultraviolet induced surface defect processes

 

 

Slava Medvedev (2015)

Tailoring spectral properties of Extreme UV multilayer optics

 

 

Muharrem Bayraktar (2015)

Adaptive multilayer optics for extreme ultraviolet wavelengths

 

 

Steven Nyabero (2014)

Thermally induced diffusion phenomena and compound interlayer structural changes in EUV multilayers

 

 

Alexey Kuznetsov (2013)

Hydrogen particle and plasma interactions with heterogeneous structures

 

 

Jeroen Bosgra (2013)

Interlayer thermodynamics in nanoscale layered structures for reflection of EUV radiation

 

 

Igor Makhotkin (2013)

Structural and reflective characteristics of multilayers for 6.x nm wavelength

 

 

Robert van der Meer (2013)

Single-order Lamellar multilayer gratings

 

 

Eric Louis (2012)

Physics and technology development of multilayer EUV reflective optics

 

 

Toine van den Boogaard (2011)

Ion-enhanced growth in planar and structured Mo/si multilayers

 

 

Juequan Chen (2011)

Characterization of EUV induced contamination on multilayer optics

 

 

Saskia Bruijn (2011)

Diffusion phenomena in chemically stabilized multilayer structures

 

 

Véronique de Rooij-Lohmann

(2010)

Nanoscale diffusion, compound formation and phase transitions in Mo/Si multilayer structures

 

 

Tim Tsarfati (2009)

Surface and interface dynamics in multilayered systems

 

 

Ileana Nedelcu (2007)

Interface structure and interdiffusion in Mo/Si multilayers

 

 

Marc Kessels (2005)

Interfaces in soft x-ray multilayer mirrors

 

 

René de Bruijn (2004)

Dynamics of laser produced XUV emitting plasmas

 

 

Remko Stuik (2002)

Characterization of XUV sources

 

 

Harm-Jan Voorma (1997)

Mo/Si multilayer optics for micro-lithography