Where you can make it, in Si and SiO2

The cleanroom is the central laboratory for micro- and nanofabrication for researchers and (small) companies. We offer state-of-the-art processing equipment within our 1000 m2 cleanroom facilities with an open access and pay-per-use for the available equipment.

The cleanroom houses more than 200 items of advanced equipment that can be used to create an unlimited number of applications, and provide a variety of  analysis. This makes it possible to realize excellent -interdisciplinary- research in the field of micro and nanotechnology.

The cleanroom is available for  researchers of the University of Twente, other institutes and for use by industrial partners; from small and medium enterprises to multinationals.
Depending on their needs; these parties have access to all the equipment, technologies and expertise they need to realize their research, develop prototypes or produce a limited number of (nano) devices. If required, MESA+ staff members  and researchers can provide technical and technological assistance.