For each of the analysis techniques we have written application notes
Damage control in FIB; an introduction. See also the TEM Applications web page, where this application is published as TEM APPLICATION 6.
The SEM has a number of detectors capable of analysing samples in a couple of different ways.
Offers a variety of chemical analysis techniques to explore the surface and internal structure of a specimen
The scanning XPS microprobe offers a couple of ways to analyse the contents of samples on a scale of 10's of micrometers.