Analysis TEM application notes
TEM specimen preparation, an introduction
Specimen preparation aspects of samples, composed of materials with very different properties, for cross-sectional TEM (XTEM) observation. Example: Dimple Grinding/Polishing and Argon ion milling as applied to a brittle magnetic thin film on a flexible plastic tape.
XTEM analysis of porous anodic aluminium oxide films with columnar structure.
Observation of blisters; the importance of specimen thickness to allow XTEM viewing of the fully intact hemispherical blister dome.
XTEM of a very thick thick film of piezoelectric material on an electrically non-conductive substrate. Piece of a cake or true challenge? In this example is shown how for such systems the traditional method of TEM specimen preparation by mechanical thinning (dimpling) compares with Focused Ion Beam.
Surface amorphisation is a well known, well understood, and well reported artifact in specimen thinning by ion beams. For newbies interested in this subject, an introduction into this phenomenon is given in this easy-to-read Application Note, illustrated by an example where FIB is used.
Energy-Filtered TEM (EFTEM) is a derivative technique of Electron Energy Loss Spectroscopy. EFTEM is an ideal tool for chemical element analysis in a standard TEM. Its applicability in interdiffusion studies will be demonstrated.