M.T. Blom, N.R. Tas, G. Pandraud, E. Chmela, J.G.E. Gardeniers, R. Tijssen, M. Elwenspoek and A. van den Berg
Failure mechanisms of pressurized micro channels, model and experiments
Journal of Micro Electro Mechanical Systems 10 (2001) pp. 158-164.


T.T. Veenstra, J.W. Berenschot, J.G.E. Gardeniers, R.G.P. Sanders, M.C. Elwenspoek and A. van den Berg
The use of selective anodic bonding to create micropump chambers with virtually no dead volume
Journal of the Electrochemical Society 148 (2001) pp. G68-G72.


A.J. Nijdam, E. van Veenendaal, H.M. Cuppen, J. van Suchtelen, M.L. Reed, J.G.E. Gardeniers, W.J.P. van Enckevort, E. Vlieg and M. Elwenspoek
Formation and stabilisation of pyramidal etching hillocks on silicon {100} in anisotropic etchants: experimental observations and Monte carlo simulations
Journal Applied Physics 89 (2001) pp. 4113-4123.


A.J. Nijdam, J.G.E. Gardeniers, J.W. Berenschot, E. van Veenendaal, J. van

Suchtelen and M. Elwenspoek
Influence of the angle between etched (near) Si(111) and the substrate orientation on the underetch rate during anisotropic wet-chemical etching of silicon
Journal of Micromechanics and Microengineering 11 (2001) pp. 499-503


M.T. Blom, E. Chmela, J.G.E. Gardeniers, J.W. Berenschot, M. Elwenspoek, R. Tijssen and A. van den Berg
Local anodic bonding of Kovar to Pyrex aimed at high-pressure, solvent-resistant microfluidic connections
Journal of Micromechanics and Microengineering 11 (2001) pp. 382-385.