Publications 2001

M.T. Blom, N.R. Tas, G. Pandraud, E. Chmela, J.G.E. Gardeniers, R. Tijssen, M. Elwenspoek and A. van den Berg
Failure mechanisms of pressurized micro channels, model and experiments
Journal of Micro Electro Mechanical Systems 10 (2001) pp. 158-164.

T.T. Veenstra, J.W. Berenschot, J.G.E. Gardeniers, R.G.P. Sanders, M.C. Elwenspoek and A. van den Berg
The use of selective anodic bonding to create micropump chambers with virtually no dead volume
Journal of the Electrochemical Society 148 (2001) pp. G68-G72.

A.J. Nijdam, E. van Veenendaal, H.M. Cuppen, J. van Suchtelen, M.L. Reed, J.G.E. Gardeniers, W.J.P. van Enckevort, E. Vlieg and M. Elwenspoek
Formation and stabilisation of pyramidal etching hillocks on silicon {100} in anisotropic etchants: experimental observations and Monte carlo simulations
Journal Applied Physics 89 (2001) pp. 4113-4123.

A.J. Nijdam, J.G.E. Gardeniers, J.W. Berenschot, E. van Veenendaal, J. van

Suchtelen and M. Elwenspoek
Influence of the angle between etched (near) Si(111) and the substrate orientation on the underetch rate during anisotropic wet-chemical etching of silicon
Journal of Micromechanics and Microengineering 11 (2001) pp. 499-503

M.T. Blom, E. Chmela, J.G.E. Gardeniers, J.W. Berenschot, M. Elwenspoek, R. Tijssen and A. van den Berg
Local anodic bonding of Kovar to Pyrex aimed at high-pressure, solvent-resistant microfluidic connections
Journal of Micromechanics and Microengineering 11 (2001) pp. 382-385.