Publications 1997

C. Gui, H. Albers, J.G.E. Gardeniers, M. Elwenspoek and P.V. Lambeck
Fusion bonding of rough surfaces with polishing technique for silicon micromachining
Microsystem Technologies 3 (1997) pp.122-128.

C.R. Neagu, J.G.E. Gardeniers, M.C. Elwenspoek and J.J. Kelly
An electrochemical active valve
Electrochimica Acta 42 (1997) pp.3367-3373.

R.W. Tjerkstra, M.J. de Boer, J.W. Berenschot, J.G.E. Gardeniers, A. van den Berg and M.C. Elwenspoek
Etching technology for chromatography microchannels
Electrochimica Acta 42 (1997) pp.3399-3406.

C.R. Neagu, H.V.Jansen, A. Smith, J.G.E. Gardeniers and M.C. Elwenspoek
Characterization of a planar microcoil for implantable Microsystems
Sensors and Actuators A 62 (1997) pp.599-611.

Cs. Dücso, É. Vázsonyi, M. Ádám, I. Szabó, I. Bársony, J.G.E. Gardeniers and A. van den Berg
Porous silicon bulk micromachining for thermally isolated membrane formation
Sensors and Actuators A 60 (1997) pp.235-239.

M.W. van Toor, T.S.J. Lammerink, J.G.E. Gardeniers, M. Elwenspoek and D. Monsma
A novel micromechanical flow controller
Journal of Micromechanics and Microengineering 7 (1997) pp. 165-169.