Publications 1996

C.R. Neagu, J.G.E. Gardeniers, M. Elwenspoek and J.J. Kelly
An electrochemical microactuator: principle and first results
Journal of Micro Electro Mechanical Systems 5 (1996) pp.2-9.

H.V. Jansen, J.G.E. Gardeniers, M.J. de Boer, M. Elwenspoek and J.H.J. Fluitman
A survey on the reactive ion etching of silicon in microtechnology
Journal of Micromechanics and Microengineering 6 (1996) pp.14-28.

P. Bressers, J.J. Kelly, J.G.E. Gardeniers and M. Elwenspoek
Surface morphology of (100) silicon etched in aqueous alkaline solution
Journal of the Electrochemical Society 143 (1996) pp.1744-1750.

S.L. King, J.G.E. Gardeniers and I.W. Boyd
Pulsed-laser deposited ZnO for device applications
Applied Surface Science 96-98 (1996) pp.811-818.

J.G.E. Gardeniers, H.A.C. Tilmans and C.C.G. Visser
LPCVD silicon-rich silicon nitride films for applications in micromechanics, studied with statistical experimental design
Journal of Vacuum Science and Technology A 14 (1996) pp.2879-2892.