Publications 1994

J.G.E. Gardeniers en N.G. Laursen
Corrosion of protective layers on strained silicon surfaces in alkaline solutions
Sensors and Materials 5 (1994) pp.189-208.

H.V. Jansen, J.G.E. Gardeniers, J. Elders, H.A.C. Tilmans and M. Elwenspoek
Applications of fluorocarbon polymers in micromechanics and micromachining
Sensors and Actuators A 41-42 (1994) pp.136-140.

J.W. Berenschot, J.G.E. Gardeniers, T.S.J. Lammerink and M. Elwenspoek
New applications of R.F.-sputtered glass films as protection and bonding layers in silicon micromachining
Sensors and Actuators A 41-42 (1994) pp.338-343.

V. Craciun, J. Elders, J.G.E. Gardeniers en I.W. Boyd
Characteristics of high quality ZnO thin films deposited by pulsed laser deposition
Applied Physics Letters 65 (1994) pp.2963-2965.