See Specialisations

Micro Sensors and Systems

Chair: Integrated Devices and Systems

Introduction

Miniaturization allows the creation of highly sensitive, compact, light-weight sensors and sensor systems. Besides their small size, a fascinating aspect of such sensors is that multiple subfields of physics, chemistry and electrical engineering come together when we want to make and understand such sensor systems.

The research on micro sensors and systems spans from materials via process integration and device physics to device reliability; you can usually find us in or around Nanolab. Examples are: ultra-low-noise accelerometers for noise reduction in the detection of gravitation waves and microfluidic measurement systems for medical drug delivery.

The Micro Sensors and Systems track is directly linked with the research group Integrated Devices and Systems (IDS) and the research institute MESA+. This means you will have excellent peer guidance and will be working on the newest challenges.

Programme mentor

dr.ir. R.J. Wiegerink (Remco)
Associate Professor

Compulsory courses

Code

Course

Study load (EC)

Quarter

191210930

Measurement Systems for Mechatronics

5

1A

201900007

Perspectives on Engineering Design

2,5

1B

201100137

Philosophy of Engineering: Ethics

2,5

1B

191211300

Micro Electro Mechanical Systems Design

5

2A

Additional compulsory courses for 10EC will be chosen by the programme mentor from the following list, after discussion with the student:

Code

Course

Study load (EC)

Quarter

191210740

Material Science

5

1A

201900042

Nanomaterials Research

5

1A

191210750

System-on-Chip Design

10

1A, 1B

191210730

Technology

5

1B

193400141

Nanoelectronics

5

1B

191211690

EMstatics

5

1B

191210850

Advanced Analog IC Electronics

5

2A

191131360

Design Principles for Precision Mechanisms

5

2A

201700025

Solar Energy

5

2A

201900135

Advanced Semiconductor Device Physics

5

2A

191211440

Integrated Circuit Technology

5

2B

191211000

Semiconductor Project

5

Year

These courses are also interesting electives for this specialisation.

Website for more information

https://www.utwente.nl/en/eemcs/ids/