Our research programme on integrated circuit manufacturing aims to prove new concepts for nanoscale materials, devices or systems using nano- and microfabrication techniques.

We work on:

  • Nanotechnology: making and analyzing new insulators, metals and semiconductors of few-nanometer thickness (e.g., poly-GaN, pure boron) for possible application in integrated circuits.
  • Novel nanoscale devices: can we use the CMOS environment to host novel parts such as light-emitting diodes, photodiodes, passive components, gas sensors and radiation imagers? Or can we improve the CMOS environment even more?
  • Mechanical microsensors and microfluidic handling systems: improving the state-of-the-art in force sensors and accelerometers and realizing microfluidic systems to measure and control extremely small mass flow rates.

We normally fabricate our devices in the Nanolab Twente. In some cases we partner with external research groups, universities or companies to combine scientific and technological strengths, as we did for instance when we produced solar cells on top of a microchip, or when we deposited lead zirconate titanate (PZT) on finFET transistors.