Key-note presentations will be given by internationally recognised experts from both academia and industry. The topics range from fundamental principles to simulation/modelling of processes, plasma sources, and various applications. The programme is:
TUESDAY - 26TH OF MAY
Time | Title | Presenter | Affiliation |
12:30 | Registration with coffee/tea | ||
13:30 | Opening | Susana Cardoso de Freitas | |
13:45 | Decoding low-temperature plasmas: Models, Limits, and Opportunities | Tiago Silva & Luís Alves | |
15:00 | Coffee break | ||
15:30 | Title to be announced | Andrei Uvarov | |
16:15 | Advanced Plasma Etching for Photonic Integrated Circuit (PIC): III–V Semiconductor Etching, PhC etching, ALE, and Si DRIE Technologies | Tomoyuki Nonaka | |
17:00 | Closing of day 1 |
WEDNESDAY - 27TH OF MAY
Time | Title | Presenter | Affiliation |
08:30 | Start-up with coffee/tea | ||
09:00 | Cryogenic etching: principles and applications | Thomas Tillocher | |
10:30 | Coffee break | ||
11:00 | Lecture on sub-micron etching | To be announced | |
11:45 | Lecture on Bosch processing | To be announced | |
12:30 | Lunch buffet | ||
14:00 | Atomic Layer Etching: Trends and Applications | Erwin Kessels | |
15:30 | Coffee break | ||
15:45 | Flash presentations by sponsors | ||
17:00 | Closing of day 2 | ||
17:15 | Network, poster, exhibition session with walking dinner |
THURSDAY - 28TH OF MAY
Time | Title | Presenter | Affiliation |
08:30 | Start-up with coffee/tea | ||
09:00 | title to be announced | Georg Umlauf | |
10:30 | Coffee break | ||
11:00 | Femtosecond laser an alternative mehod for dielectric materials etching | Jassem Safioui | |
12:30 | Lunch buffet | ||
13:30 | MacEtch fundamentals: from wet to gas etching & Metal-assisted chemical etching: a new dry etch process for high aspect ratio silicon nanostructures | Lucia Romano | |
14:30 | Hardware development new vapour MacEtch tool | To be announced | |
15:15 | Coffee break | ||
15:45 | To be announced | Kyrill Koekenberg | |
16:30 | Lecture on Plasma source design | To be announced | |
17:30 | Closing of day 3 | ||
18:00 | Bus trip to Belém in Lisbon & Dinner |
FRIDAY - 29TH OF MAY
Time | Title | Presenter | Affiliation |
08:30 | Start-up with coffee/tea | ||
09:00 | Lecture on etching of III-V materials | To be announced | |
10:30 | Coffee break | ||
11:00 | Lecture on a new chemical for dry etching | To be announced | |
11:45 | Lecture on sustainability | To be announced | |
12:30 | Closing of the event | ||
13:00 | Lunch buffet | ||
14:00 | Optional: tour around the INESC-MN facility (registration for this can be done upon arrival at the registration desk) |