Tuesday 28 September, 9:45 – 12:15

High aspect ratio hidrogenation-assisted lateral etching of (100) silicon
M. Kayyalha, J. Naghsh Nilchi, A. Ebrahimi and S. Mohajerzadeh
University of Tehran, Nano-Electronics and Thin Film Lab., Iran

AFM-based mechanical characterization of FBAR cantilevers as first step towards developing of force sensors
C.J. Camargo, H. Campanella, J. Montserrat and J. Esteve
Instituto de Microelectrónica de Barcelona IMB-CNM (CSIC), Spain

Post-processing of linear variable optical filter on CMOS chip at die-level
A. Emadi, H. Wu, G. de Graaf and R. F. Wolffenbuttel
Faculty EEMCS, Department ME/EI, Delft University of Technology, The Netherlands

MEMS based gravimeters and gravity gradiometers
R. Cuperus1, F.F. Flokstra1, R.J. Wiegerink2 and J. Flokstra1
1University of Twente, Interfaces and Correlated Electron systems, The Netherlands
2University of Twente, Transducers Science and Technology, The Netherlands

A musical instrument in MEMS
J.B.C. Engelen, H. de Boer, J.G. Beekman, A.J. Been, G.A. Folkertsma, L. Fortgens, D. de Graaf, S. Vocke, L.A. Woldering and L. Abelmann
Transducer Science and Technology, MESA+ Institute for Nanotechnology, University of Twente, Enschede, The Netherlands

Microfluidic chip development for an autonomous field deployable water quality analyser
D. Maher1, J. Healy1, J. Cleary1, G. Carroll2 and D. Diamond1
1CLARITY: Centre for Web Sensing Technologies, Dublin City University, Ireland
2EpiSensor Ltd., Ireland

A novel multisite silicon probe for laminar neural recordings with improved electrode impedance
A. Pongrácz1, G. Márton1, L. Grand2,3, É. Vázsonyi1, I. Ulbert2,3, G. Karmos2,3, S. Wiebe4 and G. Battistig1
1Research Institute for Technical Physics and Materials Science, Hungarian Academy of Sciences, Hungary
2Péter Pázmány Catholic University, Faculty of Information Technology, Hungary
3Institute for Psychology of the Hungarian Academy of Sciences, Hungary
4Plexon Inc., USA

Large deflection actuator for variable-ratio RF MEMS power divider application
Y. Li1, S. Kühne1, D. Psychogiou2, J. Hesselbarth2 and C. Hierold1
1Micro- and Nanosystems, Department of Mechanical and Process Engineering, ETH Zurich, Switzerland
2Laboratory for Electromagnetic Fields and Microwave Electronics, Department of Information Technology and Electrical Engineering, ETH Zurich, Switzerland

PVDF micro heat exchanger manufactured by ultrasonic hot embossing and welding
K. Burlage, C. Gerhardy and W.K. Schomburg
RWTH Aachen University, Konstruktion und Entwicklung von Mikrosystemen (KEmikro), Germany

A comb based in-plane SiGe capacitive accelerometer for above-IC integration
L. Wen1, K. Wouters1, L. Haspeslagh2, A. Witvrouw2 and R. Puers1
1ESAT-MICAS, Katholieke Universiteit Leuven, Belgium
2IMEC, Belgium

Surface-micromached gas sensor using thermopiles for carbon dioxide detection
S. Chen, H. Wu, G. de Graaf and R.F. Wolffenbuttel
Delft University of Technology, Faculty of EEMCS, Department of ME/EI, The Netherlands

Subwavelength nanopyramids for surface enhanced Raman scattering
M. Jin1, V. Pully2, C. Otto2, A. van den Berg1 and E T. Carlen1
1BIOS/Lab-on-a-Chip Group, 2Medical Cell Biophysics Group
1,2MESA+ Institute for Nanotechnology, 2MIRA Institute for Biomedical Technology and Technical Medicine, University of Twente, The Netherlands

A microneedle-based miniature syringe for transdermal drug delivery
C. O’Mahony, J. Scully, A. Blake and J. O’Brien
Tyndall National Institute, University College Cork, Ireland

On the processing aspects of high performance hybrid backside illuminated CMOS imagers
J. De Vos, K. De Munck, K. Minoglou, P. Ramachandra Rao, M.A. Erismis, P. De Moor and D.S. Tezcan
IMEC, Belgium

Fabrication and characterization of carbon nanotube composites for strain sensor applications
F. Ceyssens1, M. De Volder2, G. Keulemans, J.W.Seo3 and R. Puers1
1KULeuven, dept. ESAT-MICAS, Belgium.
2KULeuven, dept. Mech. 2Eng, Belgium
3KULeuven, dept. MTM, Belgium

Fluidic variable inductor using SU8 channel
I. El Gmati1,3, P. Calmon1,2, R. Fulcran1, S. Pinon1, A. Boukabache1,2, P. Pons1,2 and A.Kallala3
1LAAS-CNRS, France
2Université de Toulouse, UPS, INSA, INP, ISAE, LAAS, France
3Laboratoire instrumentations Monastir, Tunisie

Low-cost bevel-shaped sharp tipped hollow polymer-based microneedles for transdermal drug delivery
B.P. Chaudhri1,2, F. Ceyssens1, P. De Moor2, C. Van Hoof1,2 and R. Puers1,2
1ESAT, Department of Electrical Engineering, Katholieke Universiteit Leuven, Belgium
2IMEC, Belgium

Non-invasive dry electrodes for EEG
M.F. Silva, N.S. Dias, A.F. Silva, J.F. Ribeiro, L.M. Goncalves, J.P. Carmo, P.M. Mendes and J.H. Correia
University of Minho, Dept. Industrial Electronics, Portugal