“Super Low Power Hot-Surface Silicon Devices for Chemical Sensors and Actuators”

The focus of the research is related to development and investigation of super low power hot-surface silicon devices for chemical sensors and actuators. This device can perform function as a gas sensor (i.e. pellistor) for hydrocarbons or as a microreactor for catalytic combustion of hydrocarbons. In comparison with conventional chemical sensors and actuators recently being developed, devices utilizing hot plates have relatively low power consumption and allow us direct and compatible with CMOS technology integration on a chip. In this project we are aiming to a detailed understanding of chemical and microfluidic properties of these sensor devices. This will allow further application of integrated sensor chip units in exhaust gases control systems, indoor air monitoring, etc.



Pillar-Shaped Antifuse-Based Silicon Chemical Sensor and Actuator

Suspended Membrane Antifuse-Based Silicon Chemical Sensor and Actuator

Pillar-Shaped Antifuse-Based Silicon Chemical Sensor and Actuator


Suspended Membrane Antifuse-Based Silicon Chemical Sensor and Actuator


A.Y.Kovalgin, J.Holleman, G.Iordache

IEEE Sensors Journal, 7(1) 2007


A.Y.Kovalgin, J.Holleman, G.Iordache

Journal of Electrochemical Society, 153(9) 2006