Ph.D. thesis
Thesis title: | Strain and composition effects in epitaxial PZT thin films |
Year: | 2012 |
Promotor: | Prof. dr. ing. A.J.H.M. Rijnders |
Promotor: | Prof. dr. ing. D.H.A. Blank |
Date defense: | 11-05-2012 |
Summary
The deposition of perovskite oxide thin films on silicon wafers is attracting great interest, since it promises the possibility of mass-production of thin film devices with functional mechanisms such as piezoelectricity, ferroelectricity, superconductivity, magnetism, and dielectricity. Piezoelectric Micro Electro Mechanical Systems (PiezoMEMS) using Pb(Zrx,Ti1-x)O3 (PZT) films on silicon are often viewed as forerunner in this trend, with promising applications such as inkjet printheads, piezoelectric micromachined ultrasound transducers and energy harvesters. The recently achieved high-quality epitaxial PZT films on silicon substrates by pulsed laser deposition offer the opportunity to study the fundamental relation between ferroelectric and crystallographic properties.