Strain and composition effects in epitaxial PZT thin films
Prof. dr. ing. A.J.H.M. Rijnders
Prof. dr. ing. D.H.A. Blank
The deposition of perovskite oxide thin films on silicon wafers is attracting great interest, since it promises the possibility of mass-production of thin film devices with functional mechanisms such as piezoelectricity, ferroelectricity, superconductivity, magnetism, and dielectricity. Piezoelectric Micro Electro Mechanical Systems (PiezoMEMS) using Pb(Zrx,Ti1-x)O3 (PZT) films on silicon are often viewed as forerunner in this trend, with promising applications such as inkjet printheads, piezoelectric micromachined ultrasound transducers and energy harvesters. The recently achieved high-quality epitaxial PZT films on silicon substrates by pulsed laser deposition offer the opportunity to study the fundamental relation between ferroelectric and crystallographic properties.