Ph.D. thesis
Thesis title: | Soft-lithographic patterning of functional oxide and composite materials |
Year: | 2010 |
Promotor: | Prof. Dr. Ing. D.H.A. Blank |
Assistant promotor: | Dr. Ir. J.E. ten Elshof |
Date defense: | 30-06-2010 |
Summary
This thesis gives an overview of the progress made in recent years in the development of low-cost parallel patterning techniques for ceramic materials, silica, and organic-inorganic silsesquioxane-based hybrids from wet-chemical solutions and suspensions on the micrometer and nanometer scale. The emphasis of the discussion is placed on the application of soft- lithographic methods. In general, molding-based patterning approaches and surface modification-based patterning approaches can be distinguished. Lateral resolutions well below 100 nm have been accomplished with some of these methods, but the fabrication of high-aspect ratio patterns remains a challenge.