Direct Patterning of Oxides by Pulsed Laser Stencil Deposition
Prof. Dr. Ing. D.H.A. Blank
Dr. ing. A.J.H.M. Rijnders
Stencil patterning is a powerful, additive patterning technique to standard polymer lift-off lithography. This single step patterning technique has high potential for patterning materials on fragile surfaces, non planar surfaces for MEMS technology but also for patterning oxides. These oxides come in a wide variety of properties and can often been grown heteroepitaxially. However, resist lift-off techniques fail in patterning oxides and etching techniques often induce defects when patterning these materials. This work will describe how ferroelectric PbZrxTi1-xO3 is processed into devices by stencil patterning.