Monday 27 September, 15:00 – 18:00

Design and modeling of a three-mass, decoupled, tunable SOI-MEMS gyroscope with sense frame architecture
I. Sabageh1, V. Rajaraman1, E. Cretu2 and P.J. French1
1Delft University of Technology, Department of Microelectronics, EI Lab- DIMES, The Netherlands
2University of British Columbia, Department of Electrical and Computer Engineering, Canada

Robust MEMS for space applications
A. Delahunty and W.T. Pike
Imperial College London, UK

Linear variable optical filter with silver metalic layers
A. Emadi, V.R.S.S. Mokkapati, H. Wu, G. de Graaf and R. F. Wolffenbuttel
Faculty EEMCS, Department ME/EI, Delft University of Technology, The Netherlands

Fractal-based dual-band small antenna for 2.45 and 5.8 GHz
S. Ahmed1, P. Enoksson1, M.V. Rusu2 and C. Rusu3
1Chalmers University of Technology, Micro and Nanosystems group, Sweden
2Faculty of Physics, Bucharest University, Romania
3Imego AB, Sweden

Measuring thermal properties of small volumes of liquid using a robust and flexible sensor
J.J. Atherton, M.C. Rosamond, S. Johnstone and D.A. Zeze
Durham University, School of Engineering and Computing Sciences, United Kingdom

Small antenna based on a MEMS magnetic field sensor that uses a piezoelectric polymer as translation mechanism
R. Lameiro1, F. J. O. Rodrigues1, L. Gonçalves1, S. Lanceros-Mendez2, J. H. Correia1 and P. M. Mendes1
1Algoritmi, UM, Campus de Azurém, Portugal
2Center/Department of Physics, University of Minho, Portugal

Fabrication of integrated bimorphs with self aligned tips for optical switching in 2-d photonic crystal waveguides
S.M. Chakkalakkal Abdulla1, L.J. Kauppinen2, M. Dijkstra2, M.J. de Boer1, E. Berenschot1, R.M. de Ridder2 and G.J.M. Krijnen1
1Transducers Science and Technology, MESA+ Research Institute, University of Twente, The Netherlands
2Integrated Optical Microsystems Groups, MESA+ Research Institute, University of Twente, The Netherlands

High-throughput on-chip DNA fragmentation
L. Shui, M. Jin, J.G. Bomer, E.T. Carlen and A. van den Berg
BIOS/Lab-on-Chip Group, MESA+ Institute for Nanotechnology, University of Twente, The Netherlands

Performance metrics for MEMS tunable capacitors
M. Hill1, Y. Kubarappa1 and C. O’Mahony2
1Adaptive Wireless Systems Group, Cork Institute of Technology, Ireland
2Tyndall National Institute, University College Cork, Ireland

Ultrasoft Finemet thin films for magneto-impedance microsensors
J. Moulin
1, I. Shahosseini1, F. Alves2 and F. Mazaleyrat3
1IEF, UMR 8622, Univ Paris Sud, France
2LGEP, UMR 8507, Supelec, France
3SATIE, UMR 8029, ENS Cachan, France

3-dimensional etching of silicon substrates using a modified deep reactive ion etching technique
S. Azimi, J. Naghsh-Nilchi, A. Amini, A. Vali, M. Mehran and S. Mohajerzadeh
School of Electrical and Computer Eng, Thin Film and NanoElectronic Lab, University of Tehran, Iran

Microshutters for space physics time of flight applications
K. Brinkfeldt1, P. Enoksson2, B. Front2, M. Wieser3, M. Emanuelsson3 and S. Barabash3
1Swerea IVF, Sweden
2Chalmers University of Technology, Dept. Microtechnology and Nanoscience, Sweden
3Swedish Institute of Space Physics, Sweden

Study of injection molded surface features in terms of light reflection, wettability and durability
S. Kuhn, A. Burr, M. Kübler, M. Deckert and C. Bleesen
Heilbronn University, Mechatronics and Micro System Engineering, PIK, Germany

Simulation studies of parametric amplification in bio-inspired flow sensors
H. Droogendijk and G.J.M. Krijnen
University of Twente, MESA+ Research Institute, TheNetherlands

Adsorption studies of DNA origami on silicon dioxide
B. Albrecht 1,2, D.S. Hautzinger 1,3,4, M. Krüger2, M. Elwenspoek 4,5, K.M. Müller 3,5 and J.G. Korvink 1,4
1Laboratory for Simulation, Dep. of Microsystems Engineering (IMTEK), 2Laboratory for Sensors, Dep. of Microsystems Engineering (IMTEK), 3Laboratory for Synthetic Biosystems, Institute of Biology III, 4FRIAS, 5Centre for Biological Signaling Studies (bioss), 1–5University of Freiburg, Germany
6MESA+ Institute for nanotechnology, University of Twente, The Netherlands

3D lithography based fabrication of neural stimulator electrode arrays
F. Ceyssens1, J.Verstraete1, B. Volckaerts2 and R. Puers1
1KULeuven dept. ESAT-MICAS, Belgium.
2Cochlear Technology Center, Belgium.

A micro fuel cell stack without interconnect overhead – macro world-like stacks in MEMS
G. Scotti1,3, P. Kanninen2, T. Kallio2 and S. Franssila3
1Department of Micro and Nanosciences, Aalto University School of Science and Technology, Finland
2Department of Chemistry, Aalto University School of Science and Technology, Finland
3Department of Materials Science and Engineering, Aalto University School of Science and Technology, Finland

Fabrication technique of a compressible biocompatible interconnect using a thin film transfer process
A.A.A. Aarts1,2,3, O. Srivannavit3, K.D. Wise3, E. Yoon3, H.P. Neves1, R. Puers1,2 and C. Van Hoof1,2
1Technology Unit, IMEC, Belgium
2ESAT-Micas , KU Leuven, Belgium
3EECS, University of Michigan, USA

Interference filter based absorber for thermopile detector array by surface micromachining
H. Wu, A. Emadi, G. de Graaf and R. Wolffenbuttel
Delft University of Technology, Faculty of EEMCS, Department of ME/EI, The Netherlands

Thermal analysis, fabrication and signal processing of surface micromachined thermal conductivity based gas sensors
G. de Graaf, H. Wu and R.F. Wolffenbuttel
Delft University of Technology, Faculty EEMCS, Dept. for Micro-Electronics, The Netherlands