Niek Lokhorst

DART

Organization:

Funded by:

TKI HTSM & Malvern Panalytical

PhD:





Promotors


Daily Supervisors:



Collaboration:

Malvern Panalytical

Description:

In this project, characterisation of thin film nanostructures for various applications (e.g. semiconductor materials, extreme ultraviolet (EUV) and X-ray mirrors, and coatings for photovoltaics) will be addressed. State of the art X-ray scattering techniques offer rapid, low cost and versatile capabilities to obtain essential information about thin films and their interface structure, but unlike microscopy, measured data must be analysed using model-based approaches to solve problems that presently cannot be automated.

UT researchers and Malvern Panalytical engineers will jointly develop and test fast physics-driven and human-independent minimisation algorithms capable of solving X-ray scattering analysis tasks without requiring expert guidance and capable of providing statistical information on reconstruction.

publications:

2025

Beyond the bulk: probing the EUV optical constants of nanoscale amorphous silicon films (2025)Optics express, 33(25), 52978-52989. Naghdi, S., Woitok, J., Tiwari, A., Lokhorst, H. W., Soltwisch, V. & Makhotkin, I.https://doi.org/10.1364/OE.578082Using Monte Carlo-based Uncertainty Quantification for Free-Form XRR (2025)[Contribution to conference › Poster] 8th PTB-Seminar on VUV and EUV Metrology 2025. Lokhorst, H. W., van de Kruijs, R. W. E., Makhotkin, I. A., Schlottbom, M. & Ackermann, M.Unveiling the effect of adding B4C at the W-on-Si interface (2025)Surfaces and Interfaces, 72. Article 107471. Valpreda, A., Lokhorst, H. W., Sturm, J. M., Yakshin, A. E. & Ackermann, M.https://doi.org/10.1016/j.surfin.2025.107471Using Monte Carlo-based methods for Uncertainty Quantification for XRR (2025)[Contribution to conference › Poster] International Workshop on X-Ray and Neutron Multilayer Structures, PXRNMS 2025. Lokhorst, H. W., van de Kruijs, R. W. E., Makhotkin, I. A., Schlottbom, M. & Ackermann, M.Instrumentation and uncertainty evaluation for absolute characterization of thin films and nanostructured surfaces in advanced optical metrology (2025)Metrologia, 62(2). Article 025010. Hansen, P.-E., Siaudinyte, L., Heidenreich, S., Soltwisch, V., Lokhorst, H. W., Tiwari, A., Makhotkin, I., Mattila, A., Lassila, A., Glabisch, S., Schröder, S., Brose, S., Nolot, E., Siefke, T., Asar, M., Memis, S., Yíldíz, F., Schiek, M. & Rømer, A. T.https://doi.org/10.1088/1681-7575/adbbf3