Publications 2002

T.T. Veenstra, N.R. Sharma, F.K. Forster, J.G.E. Gardeniers, M.C. Elwenspoek and A. van den Berg
The design of an in-plane compliance structure for microfluidical systems
Sensors and Actuators B 81 (2002) pp. 377-383

R.M. Tiggelaar, T.T. Veenstra, R.G.P. Sanders, J.G.E. Gardeniers, M.C. Elwenspoek and A. van den Berg
A light detection cell to be used in a micro analysis system for ammonia
Talanta 56 (2002) pp. 331-339.

M.J. de Boer, J.G.E. Gardeniers, H.V. Jansen, E. Smulders, M.J. Gilde, G. Roelofs, J.N. Sasserath and M. Elwenspoek
Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures
Journal of microelectromechanical systems 11 (2002) pp. 385-401.

M.T. Blom, E. Chmela, J.G.E. Gardeniers, R. Tijssen, M. Elwenspoek and A. van den Berg
Design and fabrication of a hydrodynamic chromatography chip
Sensors and Actuators B 82 (2002) pp. 111-116.

E. Chmela, R. Tijssen, M.T. Blom, J.G.E. Gardeniers and A. van den Berg
A chip system for size separation of macromolecules and particles by hydrodynamic chromatography
Analytical Chemistry 74 (2002) pp. 3470-3475.

E. Chmela, M.T. Blom, J.G.E. Gardeniers, A. van den Berg and R. Tijssen
A pressure driven injection system for an ultra-flat chromatographic microchannel
Lab on a Chip 2 (2002) pp. 235-241.