M.J. de Boer, R.W. Tjerkstra, J.W. Berenschot, H.V. Jansen, G.J. Burger, J.G.E. Gardeniers, M. Elwenspoek and A. van den Berg
Micromachining of buried microchannels in silicon
Journal of Micro Electro Mechanical Systems 9 (2000) pp. 94-103.
C.R. Neagu, H.V. Jansen, J.G.E. Gardeniers and M. Elwenspoek
The electrolysis of water: an actuation principle for MEMS with a big opportunity
Mechatronics 10 (2000) pp.571-582.
E. van Veenendaal, J. van Suchtelen, W.J.P. van Enckevort, K. Sato, A.J. Nijdam,
J.G.E. Gardeniers and M. Elwenspoek
The construction of orientation-dependent crystal growth and etch rate functions, II. Application to wet chemical etching of silicon in potassium hydroxide
Journal of Applied Physics 87 (2000) pp. 8732-8740.
A.J. Nijdam, E. van Veenendaal, J.G.E. Gardeniers, A.P.M. Kentgens, G.H. Nachtegaal, and M. Elwenspoek
29Si-Nuclear Magnetic Resonance on the etching products of silicon in potassium hydroxide solutions
Journal of the Electrochemical Society 147 (2000) pp. 2195-2198.
E. van Veenendaal, A.J. Nijdam, J. van Suchtelen, K. Sato, J.G.E. Gardeniers, W.J.P. van Enckevort and M. Elwenspoek
Simulation of anisotropic wet-chemical etching using a physical model
Sensors and Actuators A 84 (2000) pp. 324-329.
A.J. Nijdam, J.G.E. Gardeniers, C. Gui and M. Elwenspoek
Etch pits and dislocations in Si {111}
Sensors and Actuators A 86 (2000) pp. 238-247.
R.W. Tjerkstra, J.G.E. Gardeniers, J.J. Kelly and A. van den Berg
Multi walled microchannels: Free-standing porous silicon membranes for use in μTAS
Journal of Micro Electro Mechanical Systems 9 (2000) pp. 495-501.