J.G.E. Gardeniers, C.H. Klein Douwel and L.J. Giling
Reduced pressure silicon CVD on hemispherical substrates
Journal of Crystal Growth 108 (1991) pp.319-334.
J.G.E. Gardeniers and L.J. Giling
Vapour growth of silicon, growth anisotropy and adsorption
Journal of Crystal Growth 115 (1991) pp.542-550.