MCS MEMS conference paper

Xingwu and Henk-Willem from MCS published a MEMS conference paper on nanoparticle trapping in a nano-pyramid array. These nano-pyramids were first simulated with SolidWorks and afterwards fabricated with laser interference lithography and corner lithography. It can be used as the technical template to perform the bio mass trapping and/or independent reaction chamber.

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Nano-pyramid arrays for nano-particle trapping

X. Sun, H. W. Veltkamp, E. J. W. Berenschot, H. J. G. E. Gardeniers, N. R. Tas